Indirectly heated cathode arc discharge source for ion implantation of semiconductors

1998 ◽  
Vol 69 (4) ◽  
pp. 1688-1690 ◽  
Author(s):  
Thomas N. Horsky
Keyword(s):  
Ion Implantation ◽  
Arc Discharge ◽  
Discharge Source ◽  
Cathode Arc ◽  
Heated Cathode

Simplified cascaded arc discharge source for production of a processing plasma

1993 ◽  
Vol 64 (4) ◽  
pp. 990-995 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Shinya Yagura ◽  
Hiroshi Ishikura ◽  
Hiroharu Fujita
Keyword(s):  
Arc Discharge ◽  
Discharge Source

A study of argon metastable generation in a hollow cathode arc

1984 ◽  
Vol 62 (2) ◽  
pp. 141-147
Author(s):  
Marc Fortin ◽  
Paul Meubus
Keyword(s):  
Hollow Cathode ◽  
Potential Energy Curve ◽  
Arc Discharge ◽  
Rare Gas ◽  
Energy Curve ◽  
Helium Mixture ◽  
Wavelength Scale ◽  
Gas Molecules ◽  
Cathode Arc ◽  
Radiation Measurements

A study is made of the intense spectroscopic continuum obtained between 120 and 180 nm for an argon–helium mixture (15% He) deexcitation, the emission originating from a hollow cathode arc discharge operated at 2900 K and a calculated pressure of 20 kPa. The deexcitation of the excimers toward the repulsive fundamental level gives way to an ultraviolet (UV) continuum, which is a characteristic of the potential energy curve for these molecules and whose position in the wavelength scale depends on the temperature of the hollow cathode. This continuum is identified as the second Tanaka continuum.Absolute radiation measurements have been made with a gold coated photocathode in order to determine the excited rare gas molecules [Formula: see text] concentration, which is in the order of 7 × 1013 cm−3.Such concentrations are high and seem to be related to the generation means used (hollow cathode).The spectroscopic results obtained with the indicated specific argon–helium mixture imply a major contribution of a precursor of the type (He–Ar)+ for the [Formula: see text] metastable formation.

Plasma scrape‐off effect in a magnetized hollow‐cathode arc discharge

1988 ◽  
Vol 64 (5) ◽  
pp. 2298-2304 ◽  
Author(s):  
W. W. Byszewski ◽  
F. Hummernbrum ◽  
P. Jauernik ◽  
H. Kempkens ◽  
J. Uhlenbusch
Keyword(s):  
Hollow Cathode ◽  
Arc Discharge ◽  
Cathode Arc

Study on a negative hydrogen ion source with hot cathode arc discharge

2014 ◽  
Vol 85 (2) ◽  
pp. 02B120 ◽  
Author(s):  
S. H. Lin ◽  
X. Fang ◽  
H. J. Zhang ◽  
C. Qian ◽  
B. H. Ma ◽  
...  
Keyword(s):  
Arc Discharge ◽  
Ion Source ◽  
Hydrogen Ion ◽  
Negative Hydrogen Ion ◽  
Cathode Arc
Sign in / Sign up

Export Citation Format

Share Document