Linear arc discharge source for large area plasma processing

1997 ◽  
Vol 70 (5) ◽  
pp. 577-579 ◽  
Author(s):  
L. Bárdoš ◽  
H. Baránková ◽  
S. Berg
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Arc Discharge ◽  
Plasma Processing ◽  
Large Area ◽  
Discharge Source

Use of RF Bias in LAPPS (Large Area Plasma Processing System)

2000 ◽  
Author(s):  
Wallace M. Manheimer ◽  
Martin Lampe ◽  
Richard F. Fernsler
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Plasma Processing ◽  
Processing System ◽  
Large Area

Simplified cascaded arc discharge source for production of a processing plasma

1993 ◽  
Vol 64 (4) ◽  
pp. 990-995 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Shinya Yagura ◽  
Hiroshi Ishikura ◽  
Hiroharu Fujita
Keyword(s):  
Arc Discharge ◽  
Discharge Source

Synthesis of silver nanoparticles using large-area arc discharge and its application in electronic packaging

2016 ◽  
Vol 52 (6) ◽  
pp. 3375-3387 ◽  
Author(s):  
Hongqiang Zhang ◽  
Guisheng Zou ◽  
Lei Liu ◽  
Hao Tong ◽  
Yong Li ◽  
...  
Keyword(s):  
Silver Nanoparticles ◽  
Electronic Packaging ◽  
Arc Discharge ◽  
Large Area

Synthesis and characteristics of Ag/Pt bimetallic nanocomposites by arc-discharge solution plasma processing

2012 ◽  
Vol 23 (39) ◽  
pp. 395602 ◽  
Author(s):  
Panuphong Pootawang ◽  
Nagahiro Saito ◽  
Osamu Takai ◽  
Sang-Yul Lee
Keyword(s):  
Arc Discharge ◽  
Plasma Processing ◽  
Bimetallic Nanocomposites ◽  
Solution Plasma Processing

Theoretical overview of the large-area plasma processing system (LAPPS)

2000 ◽  
Vol 9 (3) ◽  
pp. 370-386 ◽  
Author(s):  
Wallace M Manheimer ◽  
Richard F Fernsler ◽  
Martin Lampe ◽  
Robert A Meger
Keyword(s):  
Plasma Processing ◽  
Processing System ◽  
Large Area ◽  
Theoretical Overview

Use of radio frequency bias in the large area plasma processing system

2001 ◽  
Vol 19 (2) ◽  
pp. 490-498 ◽  
Author(s):  
Wallace M. Manheimer ◽  
Martin Lampe ◽  
Richard F. Fernsler
Keyword(s):  
Radio Frequency ◽  
Plasma Processing ◽  
Processing System ◽  
Large Area
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