Development of a cascade arc discharge source for an atmosphere-vacuum interface device

2016 ◽  
Vol 87 (8) ◽  
pp. 083503 ◽  
Author(s):  
S. Namba ◽  
T. Endo ◽  
S. Fujino ◽  
C. Suzuki ◽  
N. Tamura
Keyword(s):  
Arc Discharge ◽  
Cascade Arc ◽  
Discharge Source ◽  
Vacuum Interface ◽  
Interface Device

Simplified cascaded arc discharge source for production of a processing plasma

1993 ◽  
Vol 64 (4) ◽  
pp. 990-995 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Shinya Yagura ◽  
Hiroshi Ishikura ◽  
Hiroharu Fujita
Keyword(s):  
Arc Discharge ◽  
Discharge Source

scholarly journals Quantitative characterization of arc discharge as vacuum interface

2014 ◽  
Vol 21 (12) ◽  
pp. 123511 ◽  
Author(s):  
S. Huang ◽  
K. Zhu ◽  
Y. R. Lu ◽  
S. Z. Wang ◽  
A. Hershcovitch ◽  
...  
Keyword(s):  
Arc Discharge ◽  
Quantitative Characterization ◽  
Vacuum Interface

Linear arc discharge source for large area plasma processing

1997 ◽  
Vol 70 (5) ◽  
pp. 577-579 ◽  
Author(s):  
L. Bárdoš ◽  
H. Baránková ◽  
S. Berg
Keyword(s):  
Arc Discharge ◽  
Plasma Processing ◽  
Large Area ◽  
Discharge Source

Diagnosis of Electron, Vibrational and Rotational Temperatures in an Ar/N2Shock Plasma Jet Produced by a Low Pressure DC Cascade Arc Discharge

2013 ◽  
Vol 15 (9) ◽  
pp. 875-880 ◽  
Author(s):  
Cong Li ◽  
Jialiang Zhang ◽  
Zhi Yao ◽  
Xingwei Wu ◽  
Chenfei Zhang ◽  
...  
Keyword(s):  
Arc Discharge ◽  
Plasma Jet ◽  
Low Pressure ◽  
Cascade Arc
Sign in / Sign up

Export Citation Format

Share Document