Vibrating membrane elastometer for reliable measurement of mechanical properties of metallic films

1991 ◽  
Vol 62 (2) ◽  
pp. 494-501 ◽  
Author(s):  
A. Fartash ◽  
Ivan K. Schuller ◽  
M. Grimsditch
Keyword(s):  
Mechanical Properties ◽  
Metallic Films ◽  
Reliable Measurement ◽  
Vibrating Membrane

scholarly journals Temperature dependence of mechanical properties in ultrathin Au films with and without passivation

2008 ◽  
Vol 23 (9) ◽  
pp. 2406-2419 ◽  
Author(s):  
Patric A. Gruber ◽  
Sven Olliges ◽  
Eduard Arzt ◽  
Ralph Spolenak
Keyword(s):  
Mechanical Properties ◽  
Temperature Dependence ◽  
Elevated Temperatures ◽  
Bulk Material ◽  
Diffusional Creep ◽  
Strong Temperature Dependence ◽  
Metallic Films ◽  
Dislocation Glide ◽  
Thermally Activated ◽  
Passivation Layers

Temperature and film thickness are expected to have an influence on the mechanical properties of thin films. However, mechanical testing of ultrathin metallic films at elevated temperatures is difficult, and few experiments have been conducted to date. Here, we present a systematic study of the mechanical properties of 80–500-nm-thick polycrystalline Au films with and without SiNx passivation layers in the temperature range from 123 to 473 K. The films were tested by a novel synchrotron-based tensile testing technique. Pure Au films showed strong temperature dependence above 373 K, which may be explained by diffusional creep. In contrast, passivated samples appeared to deform by thermally activated dislocation glide. The observed activation energies for both mechanisms are considerably lower than those for the bulk material, indicating that concomitant stress relaxation mechanisms are more pronounced in the thin film geometry.

scholarly journals Correlating Deformation Mechanisms with Mechanical Properties in Freestanding Thin Metallic Films

2003 ◽  
Vol 9 (S02) ◽  
pp. 898-899 ◽  
Author(s):  
M. A. Haque ◽  
M. T. A. Saif ◽  
J. S. Robach ◽  
I. M. Robertson
Keyword(s):  
Mechanical Properties ◽  
Deformation Mechanisms ◽  
Metallic Films

Application of Vickers Indentation Cracking to the Evaluation of Mechanical Properties of very Thin Metallic Films

2013 ◽  
Vol 845 ◽  
pp. 287-291 ◽  
Author(s):  
Y. Nakamura
Keyword(s):  
Mechanical Properties ◽  
Plastic Deformation ◽  
Gold Film ◽  
Crack Opening ◽  
Tensile Tests ◽  
Vickers Indentation ◽  
Metallic Films ◽  
Deformation And Failure ◽  
Film Substrate ◽  
Radial Cracks

Radial cracks formed in brittle materials by Vickers indentation were used as nanoscale tensile tests for very thin metallic films coated on the brittle substrates. For the purpose of evaluating the mechanical properties of the films, a fracture-mechanics-based model was proposed, in which the crack opening displacements (COD) of film/substrate crack systems were related with the plastic deformation and failure of the films. The application of this technique to gold film/glass substrate systems indicated the possibility of the measurement of mechanical properties of very thin metallic coatings with a thickness of several 10 nm.

scholarly journals Nanoindentation Hardness of Soft Films on Hard Substrates: Effects of the Substrate

1997 ◽  
Vol 473 ◽  
Author(s):  
T. Y. Tsui ◽  
C. A. Ross ◽  
G. M. Pharr
Keyword(s):  
Mechanical Properties ◽  
Semiconductor Industry ◽  
Empirical Relationship ◽  
Metallic Films ◽  
Simple Method ◽  
Aluminum Films ◽  
Pile Up ◽  
Nanoindentation Hardness ◽  
Substrate Independent ◽  
Hard Substrates

ABSTRACTThe ability to accurately measure the mechanical properties of thin metallic films is important in the semiconductor industry as it relates to device reliability issues. One popular technique for measuring thin film mechanical properties is nanoindentation. This technique has the advantage of being able to measure properties such as hardness and elastic modulus without removing a film from its substrate. However, according to a widely-held rule of thumb, intrinsic film properties can be measured in a manner which is not influenced by the substrate only if the indentation depth is kept to less than 10% of the film thickness, which is often not practical. In this work, a method for making substrate independent hardness measurements of soft metallic films on hard substrates is proposed. The primary issue to be addressed is the substrate-induced enhancement of indentation pile-up and the ways in which this pile-up influences the contact area determined from analyses of nanoindentation load-displacement data. Based on experimental observations of soft aluminum films on silicon, glass, and sapphire substrates, a simple empirical relationship is derived which relates the amount of pile-up to the contact depth. From this relationship, a simple method is developed which allows the intrinsic hardness of the film to be measured by nanoindentation methods even when the indenter penetrates through the film into the substrate.

MECHANICAL PROPERTIES OF METALLIC FILMS

1969 ◽  
Vol 11 (4) ◽  
pp. 564-581 ◽  
Author(s):  
L S Palatnik ◽  
A I Il'inskiĭ
Keyword(s):  
Mechanical Properties ◽  
Metallic Films

Mechanical Properties of Metallic Films on Sapphire

1985 ◽  
Vol 54 ◽  
Author(s):  
F. A. List ◽  
R. A. Mckee
Keyword(s):  
Mechanical Properties ◽  
Film Growth ◽  
Resonance Spectrum ◽  
Cyclic Strain ◽  
Metallic Films ◽  
Controlled Atmospheres ◽  
Sapphire Substrates ◽  
Experimental Apparatus ◽  
Properties Of Materials ◽  
Film Substrate

ABSTRACTA knowledge of interfacial mechanical properties is of considerable importance to the areas of oxidation, corrosion, metallization, and composite materials. We have developed an experimental apparatus capable of simultaneous measurements of elastic and anelastic properties of materials in controlled atmospheres (10-6 to 104 Pa) from 25 to 1000°C. The apparatus employs the technique of dynamic reasonance in which a material's mechanical resonance spectrum can be determined over a range 102 to 105 Hz with resolution ±0.001 Hz. This resolution has enabled us to determine the mechanical properties of films as thin as approximately 10 nm.We shall present resonance results for thin films (∼100 nm) of nickel and gold on sapphire substrates. These results suggest that nickel films on sapphire are adherent, i.e., cyclic strain is continuous at the film-substrate interface, over a range of temperature about the film growth temperature; whereas gold films show nonadherent behavior at all temperatures studied.

scholarly journals Ultrathin Amorphous Carbon as Active Part of Vibrating MEMS

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 818
Author(s):  
Anne Ghis ◽  
Sébastien Thibert ◽  
Marc Delaunay
Keyword(s):  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Low Frequency ◽  
Composite Membranes ◽  
Resonant Mode ◽  
Experimental Results ◽  
Active Part ◽  
Static Mode ◽  
Vibrating Membrane

Amorphous carbon in ultra-thin thicknesses shows amazing mechanical properties that make it particularly interesting for MEMS, especially as a vibrating membrane. We present the experimental results obtained on devices comprising composite membranes of a few nanometers thick suspended above cavities of 1 to 2 μm in width. The behaviors in quasi-static mode—at low frequency—and also in resonant mode were observed and measured. Resonances frequencies of 20 MHz to 110MHz depending on the geometry were measured.

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