A time‐of‐flight mass filter for ion and cluster ion photodissociation studies

1990 ◽  
Vol 61 (4) ◽  
pp. 1204-1210 ◽  
Author(s):  
J. A. Syage ◽  
J. Steadman
Keyword(s):  
Time Of Flight ◽  
Mass Filter ◽  
Cluster Ion

SPUTTERING WITH GAS CLUSTER-ION BEAMS

1996 ◽  
Vol 03 (01) ◽  
pp. 1017-1021 ◽  
Author(s):  
J. MATSUO ◽  
M. AKIZUKI ◽  
J. NORTHBY ◽  
G.H. TAKAOKA ◽  
I. YAMADA
Keyword(s):  
Ion Irradiation ◽  
Removal Rate ◽  
Ion Beam ◽  
Solid Surfaces ◽  
Silicon Surfaces ◽  
Cluster Ions ◽  
Mass Filter ◽  
Cluster Bombardment ◽  
Cluster Ion Beams ◽  
Cluster Ion

A high-current (~100 nA) cluster-ion-beam equipment with a new mass filter has been developed to study the energetic cluster-bombardment effects on solid surfaces. A dramatic reduction of Cu concentration on silicon surfaces has been achieved by 20-keV Ar cluster (N~3000) ion bombardment. The removal rate of Cu with cluster ions is two orders of magnitude higher than that with monomer ions. A significantly higher sputtering yield is expected for cluster-ion irradiation. An energetic cluster-ion beam is quite suitable for removal of metal.

Mass filter and focusing ion detector for use with time‐of‐flight velocity distribution measurements

1979 ◽  
Vol 50 (10) ◽  
pp. 1278-1284 ◽  
Author(s):  
M. D. Burrows ◽  
S. R. Ryan ◽  
W. E. Lamb ◽  
L. C. McIntyre
Keyword(s):  
Velocity Distribution ◽  
Time Of Flight ◽  
Mass Filter ◽  
Flight Velocity ◽  
Ion Detector

scholarly journals Characterization of liquid cluster ion source by the time-of-flight method

2006 ◽  
Vol 77 (3) ◽  
pp. 03B509 ◽  
Author(s):  
Gikan H. Takaoka ◽  
Hidetaka Noguchi ◽  
Kazuya Nakayama ◽  
Masakazu Kawashita
Keyword(s):  
Time Of Flight ◽  
Ion Source ◽  
Cluster Ion Source ◽  
Cluster Ion ◽  
Time Of Flight Method
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