High-current microwave ion source for wide-energy-range O+ ion implantation
2000 ◽
Vol 71
(2)
◽
pp. 952-954
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Keyword(s):
Keyword(s):
2009 ◽
Vol 9
(1)
◽
pp. 67-74
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Keyword(s):
1992 ◽
Vol 63
(4)
◽
pp. 2562-2564
◽
2000 ◽
Vol 7
(3-4)
◽
pp. 851-854
◽
Keyword(s):
2005 ◽
Vol 191
(1)
◽
pp. 33-37
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