Comparative study of the properties of ultrathin Si3N4films with Auger electron spectroscopy, spectroscopic ellipsometry, and Raman spectroscopy

1991 ◽  
Vol 59 (3) ◽  
pp. 280-282 ◽  
Author(s):  
E. C. Paloura ◽  
S. Logothetidis ◽  
S. Boultadakis ◽  
S. Ves
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