Comparative study of the properties of ultrathin Si3N4films with Auger electron spectroscopy, spectroscopic ellipsometry, and Raman spectroscopy
1994 ◽
Vol 212-215
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pp. 1234-1238
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1985 ◽
Vol 89
(5)
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pp. 862-867
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1984 ◽
Vol 50
(11)
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pp. 1027-1031
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Keyword(s):
1992 ◽
Vol 19
(1-12)
◽
pp. 445-449
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