Etching of SiO2in an electron cyclotron resonance argon plasma

1990 ◽  
Vol 56 (14) ◽  
pp. 1311-1313 ◽  
Author(s):  
S. Salimian ◽  
C. B. Cooper ◽  
A. Ellingboe
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Argon Plasma ◽  
Electron Cyclotron

Attenuation of wall disturbances in an electron cyclotron resonance oxygen–argon plasma using real time control

2014 ◽  
Vol 32 (4) ◽  
pp. 041301 ◽  
Author(s):  
Bernard Keville ◽  
Cezar Gaman ◽  
Yang Zhang ◽  
Anthony M. Holohan ◽  
Miles M. Turner ◽  
...  
Keyword(s):  
Real Time ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Argon Plasma ◽  
Electron Cyclotron ◽  
Real Time Control ◽  
Time Control

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

1994 ◽  
Vol 30 (1) ◽  
pp. 84-85 ◽  
Author(s):  
R.J. Shul ◽  
D.J. Rieger ◽  
C. Constantine ◽  
A.G. Baca ◽  
C. Barratt
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron
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