Holey-plate structure surface-wave plasma source

1998 ◽  
Vol 08 (PR7) ◽  
pp. Pr7-195-Pr7-203
Author(s):  
Y. Yoshida
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Plate Structure ◽  
Structure Surface

Development of a large-area planar surface-wave plasma source with a cavity launcher driven by a 915 MHz UHF wave

2013 ◽  
Vol 22 (2) ◽  
pp. 025002 ◽  
Author(s):  
Xijiang Chang ◽  
Kazuki Kunii ◽  
Rongqing Liang ◽  
Masaaki Nagatsu
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Planar Surface ◽  
Large Area

scholarly journals A Surface-Wave Plasma Source with Magnetic Multicusp Fields

1998 ◽  
Vol 118 (11) ◽  
pp. 1201-1208
Author(s):  
Mutumi Tuda ◽  
Kouichi Ono ◽  
Masaaki Tsuchihashi ◽  
Minoru Hanazaki ◽  
Toshio Komemura
Keyword(s):  
Surface Wave ◽  
Plasma Source

Obtaining high rates for the etching and ashing for large liquid-crystal display substrates by using a surface-wave plasma source

2004 ◽  
Vol 87 (6) ◽  
pp. 28-38
Author(s):  
Katsuaki Aoki ◽  
Shin-ichiro Uekusa ◽  
Takeshi Yamauchi ◽  
Masashi Yamage ◽  
Shuichi Saito ◽  
...  
Keyword(s):  
Liquid Crystal ◽  
Surface Wave ◽  
Liquid Crystal Display ◽  
Plasma Source

Plasma distribution in a planar-type surface wave-excited plasma source

2006 ◽  
Vol 506-507 ◽  
pp. 503-507 ◽  
Author(s):  
H. Kousaka ◽  
K. Ono ◽  
N. Umehara ◽  
I. Sawada ◽  
K. Ishibashi
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Plasma Distribution

Plasma properties of a new surface-wave-sustained plasma source under the conditions of depositing DLC films

2006 ◽  
Vol 201 (1-2) ◽  
pp. 408-412 ◽  
Author(s):  
Junqi Xu ◽  
Hiroyuki Kousaka ◽  
Noritsugu Umehara ◽  
Dongfeng Diao
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Plasma Properties

A large-area plasma source excited by a tunable surface wave cavity

1999 ◽  
Vol 70 (5) ◽  
pp. 2331-2337 ◽  
Author(s):  
T. J. Wu ◽  
C. S. Kou
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Large Area
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