Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist

M. Gnan; S. Thoms; D.S. Macintyre; R.M. De La Rue; M. Sorel

doi:10.1049/el:20082985

Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist

Electronics Letters ◽

10.1049/el:20082985 ◽

2008 ◽

Vol 44 (2) ◽

pp. 115 ◽

Cited By ~ 155

Author(s):

M. Gnan ◽

S. Thoms ◽

D.S. Macintyre ◽

R.M. De La Rue ◽

M. Sorel

Keyword(s):

Electron Beam ◽

Silicon On Insulator ◽

Hydrogen Silsesquioxane ◽

Low Loss ◽

Photonic Wires

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Optimization of electron beam patterned hydrogen silsesquioxane mask edge roughness for low-loss silicon waveguides

Journal of Nanophotonics ◽

10.1117/1.jnp.8.083098 ◽

2014 ◽

Vol 8 (1) ◽

pp. 083098 ◽

Cited By ~ 14

Author(s):

Michael G. Wood ◽

Li Chen ◽

Justin R. Burr ◽

Ronald M. Reano

Keyword(s):

Electron Beam ◽

Hydrogen Silsesquioxane ◽

Low Loss ◽

Silicon Waveguides ◽

Edge Roughness ◽

Mask Edge

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Low-loss, single-mode photonic wires and ring resonators in silicon-on-insulator

The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003. ◽

10.1109/leos.2003.1251751 ◽

2004 ◽

Cited By ~ 3

Author(s):

P. Dumon ◽

W. Bogaerts ◽

J. Van Campenhout ◽

V. Wiaux ◽

J. Wouters ◽

...

Keyword(s):

Single Mode ◽

Silicon On Insulator ◽

Ring Resonators ◽

Low Loss ◽

Photonic Wires

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Hydrogen silsesquioxane electron beam lithography for ultra-small single electron transistors in silicon on insulator

Microelectronic Engineering ◽

10.1016/j.mee.2009.10.022 ◽

2010 ◽

Vol 87 (5-8) ◽

pp. 1643-1645 ◽

Cited By ~ 1

Author(s):

W. Daves ◽

M. Ruoff ◽

M. Fleischer ◽

D.A. Wharam ◽

D.P. Kern

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Silicon On Insulator ◽

Single Electron ◽

Hydrogen Silsesquioxane ◽

Single Electron Transistors ◽

Electron Transistors

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Low-loss photonic wires and compact ring resonators in silicon-on-insulator

10.1117/12.548266 ◽

2004 ◽

Cited By ~ 2

Author(s):

Pieter Dumon ◽

Wim Bogaerts ◽

Joris Van Campenhout ◽

Vincent Wiaux ◽

Johan M. Wouters ◽

...

Keyword(s):

Silicon On Insulator ◽

Ring Resonators ◽

Compact Ring ◽

Low Loss ◽

Photonic Wires

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High-efficiency silicon optoelectronic modulator based on a Bragg mirror and integrated in a low-loss silicon-on-insulator waveguide

10.1117/12.371242 ◽

1999 ◽

Cited By ~ 5

Author(s):

Andrea Irace ◽

Giuseppe Coppola ◽

Mario Iodice ◽

Antonello Cutolo

Keyword(s):

High Efficiency ◽

Silicon On Insulator ◽

Low Loss ◽

Bragg Mirror

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AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

Applied Surface Science ◽

10.1016/j.apsusc.2004.05.287 ◽

2005 ◽

Vol 239 (3-4) ◽

pp. 327-334 ◽

Cited By ~ 13

Author(s):

Ming Zhu ◽

Peng Chen ◽

Ricky K.Y. Fu ◽

Weili Liu ◽

Chenglu Lin ◽

...

Keyword(s):

Thin Films ◽

Electron Beam ◽

High Vacuum ◽

Electron Beam Evaporation ◽

Silicon On Insulator ◽

Ultra High Vacuum

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Influence of hydrogen silsesquioxane resist exposure temperature on ultrahigh resolution electron beam lithography

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2987965 ◽

2008 ◽

Vol 26 (6) ◽

pp. 2049-2053 ◽

Cited By ~ 12

Author(s):

Vadim Sidorkin ◽

Emile van der Drift ◽

Huub Salemink

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Hydrogen Silsesquioxane ◽

Ultrahigh Resolution ◽

Exposure Temperature ◽

Resolution Electron

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Consideration on the void generation mechanism in electron‐beam recrystallized silicon‐on‐insulator films

Journal of Applied Physics ◽

10.1063/1.342875 ◽

1989 ◽

Vol 65 (5) ◽

pp. 2057-2063 ◽

Cited By ~ 4

Author(s):

Susumu Horita ◽

Hiroshi Ishiwara

Keyword(s):

Electron Beam ◽

Silicon On Insulator ◽

Generation Mechanism

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Compact low loss silicon-on-insulator waveguide for broadband mid-infrared photonics

2017 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) ◽

10.1109/cleopr.2017.8118901 ◽

2017 ◽

Author(s):

Bowei Dong ◽

Xianshu Luo ◽

Hong Wang ◽

Chengkuo Lee ◽

Guo-Qiang Lo

Keyword(s):

Silicon On Insulator ◽

Low Loss ◽

Mid Infrared

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Demonstration of low-loss on-chip integrated plasmonic waveguide based on simple fabrication steps on silicon-on-insulator platform

Applied Physics Letters ◽

10.1063/1.4739523 ◽

2012 ◽

Vol 101 (4) ◽

pp. 041117 ◽

Cited By ~ 12

Author(s):

Landobasa Y. M. Tobing ◽

Liliana Tjahjana ◽

Dao Hua Zhang

Keyword(s):

Plasmonic Waveguide ◽

Silicon On Insulator ◽

Low Loss ◽

On Chip

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