High performance poly-Si TFTs fabricated by continuous-wave laser annealing of metal-induced lateral crystallised silicon films

2008 ◽  
Vol 44 (19) ◽  
pp. 1157 ◽  
Author(s):  
C.-P. Chang ◽  
Y.S. Wu
Keyword(s):  
High Performance ◽  
Laser Annealing ◽  
Continuous Wave ◽  
Silicon Films ◽  
Continuous Wave Laser ◽  
Wave Laser

High-Performance LTPS-TFTs Fabricated by Continuous Wave Laser Annealing

2007 ◽  
Author(s):  
Chun-Chien Tsai ◽  
Kai-Fang Wei ◽  
Yao-Jen Lee ◽  
Jyh-Liang Wang ◽  
I-Che Lee ◽  
...  
Keyword(s):  
High Performance ◽  
Laser Annealing ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Wave Laser

High-Performance Germanium Thin-Film Transistors With Single-Crystal-Like Channel via Continuous-Wave Laser Crystallization

2018 ◽  
Vol 39 (12) ◽  
pp. 1864-1867 ◽  
Author(s):  
Yi-Shao Li ◽  
Chun-Yi Wu ◽  
Chan-Yu Liao ◽  
Wen-Hsien Huang ◽  
Jia-Min Shieh ◽  
...  
Keyword(s):  
Thin Film ◽  
Single Crystal ◽  
Thin Film Transistors ◽  
High Performance ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Laser Crystallization ◽  
Wave Laser

Tailoring the free carrier and optoelectric properties of indium tin oxide film via quasi-continuous-wave laser annealing

2021 ◽  
Vol 538 ◽  
pp. 148104
Author(s):  
Liping Peng ◽  
Yuan'an Zhao ◽  
Xiaofeng Liu ◽  
Zhaoliang Cao ◽  
Dawei Li ◽  
...  
Keyword(s):  
Oxide Film ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Laser Annealing ◽  
Continuous Wave ◽  
Free Carrier ◽  
Continuous Wave Laser ◽  
Wave Laser

Continuous-Wave Laser Annealing of a Si/SiO2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period

2014 ◽  
Vol 6 (5) ◽  
pp. 1000-1010 ◽  
Author(s):  
Timur Nikitin ◽  
Marianna Kemell ◽  
Esa Puukilainen ◽  
Markku Räsänen ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Continuous Wave ◽  
Exposure Period ◽  
Ambient Atmosphere ◽  
Continuous Wave Laser ◽  
Wave Laser
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