Continuous-Wave Laser Annealing of a Si/SiO2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period

2014 ◽  
Vol 6 (5) ◽  
pp. 1000-1010 ◽  
Author(s):  
Timur Nikitin ◽  
Marianna Kemell ◽  
Esa Puukilainen ◽  
Markku Räsänen ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Continuous Wave ◽  
Exposure Period ◽  
Ambient Atmosphere ◽  
Continuous Wave Laser ◽  
Wave Laser

Tailoring the free carrier and optoelectric properties of indium tin oxide film via quasi-continuous-wave laser annealing

2021 ◽  
Vol 538 ◽  
pp. 148104
Author(s):  
Liping Peng ◽  
Yuan'an Zhao ◽  
Xiaofeng Liu ◽  
Zhaoliang Cao ◽  
Dawei Li ◽  
...  
Keyword(s):  
Oxide Film ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Laser Annealing ◽  
Continuous Wave ◽  
Free Carrier ◽  
Continuous Wave Laser ◽  
Wave Laser

Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic SiSiO2 phase separation

2010 ◽  
Vol 108 (12) ◽  
pp. 124301 ◽  
Author(s):  
Leonid Khriachtchev ◽  
Timur Nikitin ◽  
Markku Räsänen ◽  
Alexandra Domanskaya ◽  
Simona Boninelli ◽  
...  
Keyword(s):  
Phase Separation ◽  
Laser Annealing ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Sio2 Phase ◽  
Microscopic Picture ◽  
Wave Laser

High-Performance LTPS-TFTs Fabricated by Continuous Wave Laser Annealing

2007 ◽  
Author(s):  
Chun-Chien Tsai ◽  
Kai-Fang Wei ◽  
Yao-Jen Lee ◽  
Jyh-Liang Wang ◽  
I-Che Lee ◽  
...  
Keyword(s):  
High Performance ◽  
Laser Annealing ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Wave Laser

Generation of silicon nanocrystals by damage free continuous wave laser annealing of substrate-bound SiOx films

2015 ◽  
Vol 118 (12) ◽  
pp. 124308 ◽  
Author(s):  
T. Fricke-Begemann ◽  
N. Wang ◽  
P. Peretzki ◽  
M. Seibt ◽  
J. Ihlemann
Keyword(s):  
Silicon Nanocrystals ◽  
Laser Annealing ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Wave Laser
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