Tunable MEMS LC resonator with large tuning range

2005 ◽  
Vol 41 (15) ◽  
pp. 855 ◽  
Author(s):  
A.B. Yu ◽  
A.Q. Liu ◽  
Q.X. Zhang
Author(s):  
John D. Grade ◽  
Kevin Y. Yasumura ◽  
Hal Jerman

New DRIE actuator systems have been developed which use a high-force, linear actuator to wrap a flexible brake band around the rigid brake shoe of a large-deflection, rotary actuator. The brake can hold the rotary actuator at any arbitrary location within its full range of travel. A third actuator may be used to engage a pair of locking pins in order to keep the brake motor extended in the event of a power failure. The 100x increase in rotational stiffness after the brake is applied raises the fundamental resonant frequency by more than an order of magnitude, enabling precision optical adjustments over a large tuning range in the presence of external shock and vibration. Consistent braking accuracies of 1 mdeg, or 0.025% of the full-scale deflection, have been demonstrated across the entire rotational range


Author(s):  
A. Bangert ◽  
M. Schlechtweg ◽  
M. Lang ◽  
W. Haydl ◽  
W. Bronner ◽  
...  

2003 ◽  
Vol 50 (3) ◽  
pp. 730-739 ◽  
Author(s):  
Jinghong Chen ◽  
Jun Zou ◽  
Chang Liu ◽  
J.E. Schutt-Aine ◽  
Sung-Mo Kang

Crystals ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 431 ◽  
Author(s):  
Jitong Zhong ◽  
Yu-Sheng Lin

We present an electromechanically rotatable infrared (IR) cross-shaped metamaterial (CSM) in the mid-IR wavelength range. The CSM configuration is composed of double gold layers with cross-shaped nanostructures. To investigate the fano-resonance within CSM nanostructures, the aspect ratios and length ratios of CSM are compared and discussed. The electromagnetic responses exhibit the characteristics of large tuning range, tunable broad and narrow bandwidths. By properly tailoring the aspect ratio of CSM, the resonance can be tuned with bidirectional tuning in the range of 650 nm. CSM with different length ratios exhibit narrowband resonances around the wavelength of 4.6 μm and broadband resonances in the wavelength range of 5.0 μm to 6.5 μm. These characteristics of CSM with different aspect ratios and length ratios could be potentially used in IR narrowband and broadband filter. To further increase the flexibility of proposed electromechanically rotatable CSM, an actively tunable narrowband and broadband filter in the mid-IR wavelength range is performed. This study provides a unique approach to realizing an IR filter, with high flexibility.


2020 ◽  
Vol 477 ◽  
pp. 126368
Author(s):  
Ruyang Dong ◽  
Yang Jiang ◽  
Hao Luo ◽  
Yuejiao Zi ◽  
Jing Tian ◽  
...  

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