Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor

2003 ◽  
Vol 50 (3) ◽  
pp. 730-739 ◽  
Author(s):  
Jinghong Chen ◽  
Jun Zou ◽  
Chang Liu ◽  
J.E. Schutt-Aine ◽  
Sung-Mo Kang
Keyword(s):  
Tuning Range ◽  
Spiral Inductor ◽  
Tunable Capacitor ◽  
High Q ◽  
Large Tuning Range

A high Q, large tuning range MEMS capacitor for RF filter systems

2003 ◽  
Vol 103 (1-2) ◽  
pp. 33-41 ◽  
Author(s):  
Robert L. Borwick ◽  
Philip A. Stupar ◽  
Jeffrey DeNatale ◽  
Robert Anderson ◽  
Chialun Tsai ◽  
...  
Keyword(s):  
Tuning Range ◽  
High Q ◽  
Rf Filter ◽  
Large Tuning Range

Design and Modeling of a Wide Tuning Range, High Q, Low Supply Voltage MEMS Based Tunable Capacitor for Wireless Communication Applications

2011 ◽  
Vol 403-408 ◽  
pp. 4617-4624 ◽  
Author(s):  
B.S Sreeja ◽  
S Radha
Keyword(s):  
Mechanical Model ◽  
Tuning Range ◽  
Structural Model ◽  
Supply Voltage ◽  
Parallel Plates ◽  
Resonant Frequencies ◽  
Tunable Capacitor ◽  
High Q ◽  
Equivalent Mechanical Model ◽  
Low Supply Voltage

A simulation model for the analysis of MEMS capacitor has been developed using mechanical equivalencies. The capacitor structure used in this paper has four parallel plates to improve the tuning range. Two of the plates are suspended and the other two plates are fixed. The developed mechanical model is validated with the help of structure simulations performed using PolyMumps process. The simulation results show good correlation between the equivalent mechanical model and the structural model. The tuning range of the mechanical model developed is 2.465:1 where as the PolyMumps fabricated capacitor produces a tuning range of 2.4555:1.The mechanical resonant frequencies of the top and bottom suspended plates are simulated as 501 rad/sec and 706 rad/sec respectively.

High-Q continuously tunable zipping varactors with large tuning range

2008 ◽  
Author(s):  
Suan Hui Pu ◽  
A. Laister ◽  
A. Holmes ◽  
E. Yeatman ◽  
R. Miles ◽  
...  
Keyword(s):  
Tuning Range ◽  
High Q ◽  
Large Tuning Range

Tunable MEMS LC resonator with large tuning range

2005 ◽  
Vol 41 (15) ◽  
pp. 855 ◽  
Author(s):  
A.B. Yu ◽  
A.Q. Liu ◽  
Q.X. Zhang
Keyword(s):  
Tuning Range ◽  
Lc Resonator ◽  
Large Tuning Range
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