Post‐CMOS micromachined nickel tunable‐capacitors with a large tuning‐range under low actuating voltage
2008 ◽
Vol 50
(9)
◽
pp. 2469-2472
◽
Keyword(s):
2003 ◽
Vol 50
(3)
◽
pp. 730-739
◽
Keyword(s):