Enhanced electrostatic force generation capability of angled comb finger design used in electrostatic comb-drive actuators

1998 ◽  
Vol 34 (18) ◽  
pp. 1787 ◽  
Author(s):  
M.A. Rosa ◽  
S. Dimitrijev ◽  
H.B. Harrison
Keyword(s):  
Electrostatic Force ◽  
Force Generation ◽  
Comb Drive ◽  
Comb Finger

Out-of-Plane Comb-Drive Lever Actuator

2000 ◽  
Author(s):  
Hung-Yi Lin ◽  
Weileun Fang
Keyword(s):  
Electrostatic Force ◽  
Plane Motion ◽  
Comb Drive ◽  
Out Of Plane ◽  
Gap Closing

Abstract In the present study, an out-of-plane motion actuator driven by the electrostatic force is designed and fabricated. The electrostatic force generated by the gap closing electrodes and the comb electrodes will be studied. Moreover, a lever motion transmitting mechanism is proposed to modulate the motion of the actuators. Although the space between the driving electrodes is limited, the lever motion transmitting mechanism could enlarge the traveling distance. The applications of the out-of-plane motion actuator are remarkably increased due to the assistant of the transmitting mechanism.

Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology

2014 ◽  
Vol 609-610 ◽  
pp. 1375-1380
Author(s):  
Rui Li Meng ◽  
Hong Qun Zhang ◽  
Heng Liu
Keyword(s):  
Resonance Frequency ◽  
Electrostatic Force ◽  
Tolerance Analysis ◽  
Design Stage ◽  
Positive Slope ◽  
Mechanical Stiffness ◽  
Lateral Direction ◽  
Deep Reactive Ion Etching ◽  
Comb Finger ◽  
Fabrication Tolerances

Deep reactive ion etching (DRIE) process is specially invented for bulk micromachining fabrication with the objective of realizing high aspect ratio microstructures. However, various tolerances, such as slanted etched profile, uneven deep beams and undercut, cannot be avoided during the fabrication process. In this paper, the slanted etched profile fabrication tolerance with its effect on the performances of lateral comb-driving resonator, in terms of electrostatic force, mechanical stiffness, and resonance frequency, are discussed. It shows that comb finger with positive slope generates larger electrostatic force. The mechanical stiffness along lateral direction increases when the suspended beam slants negatively. The resonance frequency is 1.116 times larger if the comb finger and beam are tapered to -20and + 20, respectively. These analytical results can be used to compensate the fabrication tolerances at design stage and allow the resonator to provide more predictable performance.

Study on Effect of Van Der Waals Force and Casimir Force to Microsystem

2013 ◽  
Vol 336-338 ◽  
pp. 944-948
Author(s):  
Yan Wei Guan ◽  
Shi Qiao Gao ◽  
Li Shen ◽  
Yun Li He
Keyword(s):  
Scale Effect ◽  
Relative Motion ◽  
Casimir Force ◽  
Electrostatic Force ◽  
Van Der Waals ◽  
Relative Displacement ◽  
Van Der Waals Force ◽  
Micro Structure ◽  
Comb Drive ◽  
Micro Scale

Based on the electrostatic comb drive structure, the comb will do relative motion when it is driven up, and the space between them will be less than 1μm. Considering the micro-scale effect, the Van der Waals force and the Casimir force is used to analyze the influence on the micro-structure, compared with the electrostatic force. The van der Waals force and the Casimir force is almost equivalent to the electrostatic force when the initial gap of the micro-structure and the relative displacement between the micro-structure is relatively small. Therefore the van der Waals force and the Casimir force play an important role in the micro-structure and cannot be ignored.

scholarly journals Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator

2014 ◽  
Vol 2014 ◽  
pp. 1-8 ◽  
Author(s):  
Megat Muhammad Ikhsan Megat Hasnan ◽  
Mohd Faizul Mohd Sabri ◽  
Suhana Mohd Said ◽  
Nik Nazri Nik Ghazali
Keyword(s):  
Electrostatic Force ◽  
Active Area ◽  
Force Density ◽  
Comb Drive ◽  
Element Analysis ◽  
Actuation Force ◽  
Dimensional Finite Element ◽  
Good Potential ◽  
Branched Structure ◽  
Actuator Design

This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate the motion of the fishbone shaped electrostatic comb drive actuator and compared against the performance of a straight sided electrostatic comb drive actuator. Performances of both designs are evaluated by comparison of displacement and electrostatic force. For both cases, the active area and the minimum gap distance between the two electrodes were constant. An active area of 800 × 300 μm, which contained 16 fingers of fishbone shaped actuators and 40 fingers of straight sided actuators, respectively, was used. Through simulation, improvement of drive force of the fishbone shaped electrostatic comb driver is approximately 485% higher than conventional electrostatic comb driver. These results indicate that the fishbone actuator design provides good potential for applications as high force density electrostatic microactuator in MEMS systems.

scholarly journals Design and fabrication of the trapezoidal electrostatic comb-drive actuator

2012 ◽  
Vol 34 (4) ◽  
pp. 261-269
Author(s):  
Pham Hong Phuc ◽  
Dinh Khac Toan ◽  
Dang Bao Lam ◽  
Nguyen Tuan Khoa ◽  
Nguyen Tien Dung
Keyword(s):  
Theoretical Analysis ◽  
Electrostatic Force ◽  
Slope Angle ◽  
Driving Voltage ◽  
Comb Drive ◽  
Identical Dimension ◽  
Fabrication And Characterization

This paper reports the design, fabrication and characterization process of the trapezoidal Electrostatic Comb-drive Actuator (ECA) with the slope angle α=20. Together with the trapezoidal ones, the rectangular ECA with identical dimension was also designed and fabricated for comparison purpose. In order to reduce calculating deviation, the fringing effect was also taken into consider while carrying out theoretical analysis. The obtained results pointed out the fact, that the trapezoidal ECA excels the rectangular ones with the same numbers of teeth in electrostatic force and displacement generation, while requires relatively low driving voltage. But it is also observed that with higher driving voltage (larger than 50V), the trapezoidal ECA starts to lose its stability (the lateral pull-in phenomenon occurs).

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