Out-of-Plane Comb-Drive Lever Actuator

2000 ◽  
Author(s):  
Hung-Yi Lin ◽  
Weileun Fang
Keyword(s):  
Electrostatic Force ◽  
Plane Motion ◽  
Comb Drive ◽  
Out Of Plane ◽  
Gap Closing

Abstract In the present study, an out-of-plane motion actuator driven by the electrostatic force is designed and fabricated. The electrostatic force generated by the gap closing electrodes and the comb electrodes will be studied. Moreover, a lever motion transmitting mechanism is proposed to modulate the motion of the actuators. Although the space between the driving electrodes is limited, the lever motion transmitting mechanism could enlarge the traveling distance. The applications of the out-of-plane motion actuator are remarkably increased due to the assistant of the transmitting mechanism.

Development of Latching Type Large Vertical-Travel Microactuator

2005 ◽  
Author(s):  
Risaku Toda ◽  
Eui-Hyeok Yang
Keyword(s):  
Plane Motion ◽  
Proof Of Concept ◽  
Test Device ◽  
Comb Drive ◽  
Pzt Actuator ◽  
Comb Drives ◽  
Out Of Plane ◽  
Sequential Activation ◽  
Vertical Travel

This paper describes design, fabrication and preliminary characterization of a proof-of-concept vertical-travel microactuator, providing linear motion and high precision positioning in space. The microactuator is capable of providing latching function when it is un-powered to maintain its position. The microactuator consists of two opposing comb drive actuator dies, a slider and bulk PZT actuators sandwiched between the dies. The slider is inserted between clutches. Comb drives are connected to the clutches to engage/disengage clutching. Sequential activation of the comb drives (in-plane motion) and the PZT actuator (out-of-plane motion) provides cumulative linear travel of the slider. The novelty of the slider insertion approach include (1) post-fabrication engagement of comb teeth enabling thick wafer DRIE process for comb drive actuators and (2) stressed tethers enabling zero-power latching. A test device was fabricated and assembled. By applying 100V∼300V DC to the electrostatic comb drive, lateral actuation of clutches was observed. Vertical actuation by PZT was also confirmed using WYKO RST plus interferometer.

scholarly journals DESIGN AND MODELING OF A TRIPLE-STEPPED BEAM WITH OUT-OF-PLANE MOTION FOR BISTABLE MICROSWITCH APPLICATIONS

2020 ◽  
Vol 1 (38) ◽  
pp. 60-66
Author(s):  
Bich Ngoc Duong ◽  
Men Van Truong ◽  
Hung Minh Duong
Keyword(s):  
Electrostatic Force ◽  
Plane Motion ◽  
Conduction Path ◽  
Stepped Beam ◽  
Out Of Plane ◽  
Small Electrode ◽  
Perfect Contact ◽  
Method Analysis ◽  
Novel Design ◽  
Minimum Force

Microswitches have been used for many different applications in building, automation, and security due to requiring little force. A novel design of a triple-stepped beam structure for a mechanical bistable microswitch is presented, and it was found that the bistability of the beam can be achieved by applying an electrostatic force which allows a high deflection with small electrode separation. A finite element method analysis has been used to design the bistable microswitch in a certain range of geometries based on the standard of Taiwan Semiconductor Manufacturing Company (TSMC). The simulation results show that the device requires a verylow input force to get to the bistable stages. The maximum force and the minimum force for switching between the bistable stages are 0.85 mN and 0.23 mN, respectively, which is suitable for electrostatic force at a microscale. The bistability is obtained with the second equilibrium at 75.17 µm that guarantees the perfect contact location between the beam and the conduction path (N+) located at 65.45 µm.

Out-of-Plane Motion Effects in Microscopic Particle Image Velocimetry

2003 ◽  
Vol 125 (5) ◽  
pp. 895-901 ◽  
Author(s):  
Michael G. Olsen ◽  
Chris J. Bourdon
Keyword(s):  
Particle Image Velocimetry ◽  
Particle Image ◽  
Laser Sheet ◽  
Plane Motion ◽  
Entire Volume ◽  
Measurement Volume ◽  
Microscopic Particle ◽  
Image Velocimetry ◽  
Out Of Plane ◽  
Signal Peak

In microscopic particle image velocimetry (microPIV) experiments, the entire volume of a flowfield is illuminated, resulting in all of the particles in the field of view contributing to the image. Unlike in light-sheet PIV, where the depth of the measurement volume is simply the thickness of the laser sheet, in microPIV, the measurement volume depth is a function of the image forming optics of the microscope. In a flowfield with out-of-plane motion, the measurement volume (called the depth of correlation) is also a function of the magnitude of the out-of-plane motion within the measurement volume. Equations are presented describing the depth of correlation and its dependence on out-of-plane motion. The consequences of this dependence and suggestions for limiting its significance are also presented. Another result of the out-of-plane motion is that the height of the PIV signal peak in the correlation plane will decrease. Because the height of the noise peaks will not be affected by the out-of-plane motion, this could lead to erroneous velocity measurements. An equation is introduced that describes the effect of the out-of-plane motion on the signal peak height, and its implications are discussed. Finally, the derived analytical equations are compared to results calculated using synthetic PIV images, and the agreement between the two is seen to be excellent.

Vibrational potentials of the low frequency out‐of‐plane motion in the ground and excited singlet electronic states of 9,10‐dihydrophenanthrene

1992 ◽  
Vol 96 (10) ◽  
pp. 7229-7236 ◽  
Author(s):  
Marek Z. Zgierski ◽  
Francesco Zerbetto ◽  
Young‐Dong Shin ◽  
Edward C. Lim
Keyword(s):  
Low Frequency ◽  
Electronic States ◽  
Plane Motion ◽  
Excited Singlet ◽  
Out Of Plane

A New Design of Large Stroke Micro-Deformable Mirror Actuated by Electrostatic Repulsive Force

2008 ◽  
Author(s):  
Fangrong Hu ◽  
Jun Yao ◽  
Chuankai Qiu ◽  
Dajia Wang
Keyword(s):  
Electric Field ◽  
Resonant Frequency ◽  
Adaptive Optics ◽  
Bottom Electrode ◽  
Sacrificial Layer ◽  
Electrostatic Force ◽  
Repulsive Force ◽  
Deformable Mirror ◽  
Optical Aberrations ◽  
Out Of Plane

In this paper, a MEMS mirror actuated by an electrostatic repulsive force has been proposed and analyzed. The mirror consists of four U-shape springs, a fixed bottom electrode and a movable top electrode, there are many comb fingers on the edges of both electrodes. When the voltage is applied to the top and bottom electrodes, an asymmetric electric field is generated to the top movable fingers and springs, thus a net electrostatic force is produced to move the top plate out of plane. This designed micro-mirror is different from conventional MDM based on electrostatic-attractive-force, which is restricted by one-third thickness of the sacrificial layer for the pull-in phenomenon. The characteristic of this MDM has been analyzed, the result shows that the resonant frequency of the first mode is 8 kHz, and the stroke reaches 10μm at 200V, a MDM with large strokes can be realized for the application of adaptive optics in optical aberrations correction.

A pOH Jump Driven by N═N Out-of-Plane Motion in the Photoisomerization of Water-Solvated Triazabutadiene

2017 ◽  
Vol 121 (26) ◽  
pp. 4939-4947
Author(s):  
Hongmei Xiao ◽  
Lishuang Ma ◽  
Weihai Fang ◽  
Xuebo Chen
Keyword(s):  
Plane Motion ◽  
Out Of Plane
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