Moderate kink effect in fully depleted thin-film SOI MOSFETs

1995 ◽  
Vol 31 (4) ◽  
pp. 326-327 ◽  
Author(s):  
F. Balestra ◽  
T. Matsumoto ◽  
H. Nakabayashi ◽  
M. Koyanagi ◽  
M. Tsuno ◽  
...  
Keyword(s):  
Thin Film ◽  
Fully Depleted ◽  
Kink Effect

scholarly journals Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction

Nanomaterials ◽  
2020 ◽  
Vol 10 (2) ◽  
pp. 384 ◽  
Author(s):  
Maximilian Lederer ◽  
Thomas Kämpfe ◽  
Norman Vogel ◽  
Dirk Utess ◽  
Beate Volkmann ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Hafnium Oxide ◽  
Orthorhombic Phase ◽  
Vital Role ◽  
Silicon On Insulator ◽  
Oxide Semiconductor ◽  
Electrical Measurements ◽  
Fully Depleted ◽  
Scanning Transmission

The microstructure of ferroelectric hafnium oxide plays a vital role for its application, e.g., non-volatile memories. In this study, transmission Kikuchi diffraction and scanning transmission electron microscopy STEM techniques are used to compare the crystallographic phase and orientation of Si and Zr doped HfO2 thin films as well as integrated in a 22 nm fully-depleted silicon-on-insulator (FDSOI) ferroelectric field effect transistor (FeFET). Both HfO2 films showed a predominately orthorhombic phase in accordance with electrical measurements and X-ray diffraction XRD data. Furthermore, a stronger texture is found for the microstructure of the Si doped HfO2 (HSO) thin film, which is attributed to stress conditions inside the film stack during crystallization. For the HSO thin film fabricated in a metal-oxide-semiconductor (MOS) like structure, a different microstructure, with no apparent texture as well as a different fraction of orthorhombic phase is observed. The 22 nm FDSOI FeFET showed an orthorhombic phase for the HSO layer, as well as an out-of-plane texture of the [111]-axis, which is preferable for the application as non-volatile memory.

Kink effect in short-channel polycrystalline silicon thin-film transistors

2004 ◽  
Vol 85 (15) ◽  
pp. 3113-3115 ◽  
Author(s):  
A. Valletta ◽  
P. Gaucci ◽  
L. Mariucci ◽  
G. Fortunato ◽  
S. D. Brotherton
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film ◽  
Short Channel ◽  
Kink Effect

Mobility behavior and models for fully depleted nanocrystalline ZnO thin film transistors

2013 ◽  
Vol 90 ◽  
pp. 134-142 ◽  
Author(s):  
Sung-Jae Chang ◽  
Muthupandian Cheralathan ◽  
Maryline Bawedin ◽  
Benjamin Iniguez ◽  
Burhan Bayraktaroglu ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Zno Thin Film ◽  
Fully Depleted ◽  
Mobility Behavior
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