Piezoelectric properties of zinc oxide films on glass substrates deposited by RF-magnetron-mode electron cyclotron resonance sputtering system

1995 ◽  
Vol 42 (3) ◽  
pp. 345-350 ◽  
Author(s):  
M. Kadota ◽  
M. Minakata
Keyword(s):  
Zinc Oxide ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Piezoelectric Properties ◽  
Oxide Films ◽  
Electron Cyclotron ◽  
Glass Substrates ◽  
Zinc Oxide Films ◽  
Sputtering System

Morphological, Structural, Electrical and Optical Properties of Copper-Doped Zinc Oxide Films Deposited by Spray Pyrolysis

2018 ◽  
Vol 930 ◽  
pp. 79-84
Author(s):  
Juliana Simões Chagas Licurgo ◽  
Herval Ramos Paes Junior
Keyword(s):  
Zinc Oxide ◽  
Spray Pyrolysis ◽  
Oxide Films ◽  
Electrical Characterization ◽  
Xrd Analysis ◽  
Band Gap Energy ◽  
Hexagonal Structure ◽  
Material Behavior ◽  
Glass Substrates ◽  
Zinc Oxide Films

In this work, copper-doped zinc oxide films (ZnO:Cu) were deposited by spray pyrolysis on glass substrates. The influence of doping concentration (0-10 at.%) on morphological, structural, optical and electrical properties of the ZnO:Cu films was investigated. Electrical characterization consisted in measuring the variation of electrical conductivity with temperature; they presented a typical semiconductor material behavior. Based on x-ray diffraction (XRD) analysis, it was able to confirm that the films are polycrystalline having a wurtzite hexagonal structure, preferentially oriented in the c-axis (002), and the crystallite size ranged from 41.60 to 50.70 nm. The optical characterization revealed that ZnO:Cu films present band gap energy between 3.18 and 3.27 eV. The films were homogeneous with good adhesion to the substrate. The results indicate the viability of using them in optoelectronic devices.

Effect of crystalline polarity on microstructure and optoelectronic properties of gallium-doped zinc oxide films deposited onto glass substrates

2014 ◽  
Vol 552 ◽  
pp. 56-61 ◽  
Author(s):  
Tsuyoshi Ogino ◽  
Jesse R. Williams ◽  
Ken Watanabe ◽  
Isao Sakaguchi ◽  
Shunichi Hishita ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Optoelectronic Properties ◽  
Glass Substrates ◽  
Zinc Oxide Films
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