scholarly journals Understanding the effect of HF-based wet shallow etching on optical performance of reactive-ion-etched fused silica optics

RSC Advances ◽  
2021 ◽  
Vol 11 (47) ◽  
pp. 29323-29332
Author(s):  
Laixi Sun ◽  
Ting Shao ◽  
Xinda Zhou ◽  
Weihua Li ◽  
Fenfei Li ◽  
...  
Keyword(s):  
Silica Surface ◽  
Fused Silica ◽  
Laser Damage ◽  
Optical Performance ◽  
Damage Resistance

The addition of NH4F to HF solution is important for producing a smooth fused silica surface with good laser damage resistance.

scholarly journals Effects of Ion Beam Etching on the Nanoscale Damage Precursor Evolution of Fused Silica

Materials ◽  
2020 ◽  
Vol 13 (6) ◽  
pp. 1294
Author(s):  
Yaoyu Zhong ◽  
Yifan Dai ◽  
Feng Shi ◽  
Ci Song ◽  
Ye Tian ◽  
...  
Keyword(s):  
Silica Surface ◽  
Ion Beam ◽  
Damage Threshold ◽  
Fused Silica ◽  
Structural Defects ◽  
Laser Damage ◽  
Material Structure ◽  
Ion Beam Etching ◽  
Damage Resistance ◽  
Laser Induced Damage

Nanoscale laser damage precursors generated from fabrication have emerged as a new bottleneck that limits the laser damage resistance improvement of fused silica optics. In this paper, ion beam etching (IBE) technology is performed to investigate the evolutions of some nanoscale damage precursors (such as contamination and chemical structural defects) in different ion beam etched depths. Surface material structure analyses and laser damage resistance measurements are conducted. The results reveal that IBE has an evident cleaning effect on surfaces. Impurity contamination beneath the polishing redeposition layer can be mitigated through IBE. Chemical structural defects can be significantly reduced, and surface densification is weakened after IBE without damaging the precision of the fused silica surface. The photothermal absorption on the fused silica surface can be decreased by 41.2%, and the laser-induced damage threshold can be raised by 15.2% after IBE at 250 nm. This work serves as an important reference for characterizing nanoscale damage precursors and using IBE technology to increase the laser damage resistance of fused silica optics.

scholarly journals Traceless mitigation of laser damage precursors on a fused silica surface by combining reactive ion beam etching with dynamic chemical etching

RSC Advances ◽  
2018 ◽  
Vol 8 (57) ◽  
pp. 32417-32422
Author(s):  
Laixi Sun ◽  
Ting Shao ◽  
Jianfeng Xu ◽  
Xiangdong Zhou ◽  
Xin Ye ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Silica Surface ◽  
Ion Beam ◽  
Fused Silica ◽  
Laser Damage ◽  
Ion Beam Etching ◽  
Reactive Ion Beam Etching

RIBE and DCE techniques can be combined to tracelessly mitigate laser damage precursors on a fused silica surface.

Effects of Wet Chemical Etching on Scratch Morphology and Laser Damage Resistance of Fused Silica

Silicon ◽  
2019 ◽  
Vol 12 (2) ◽  
pp. 425-432 ◽  
Author(s):  
Hui Ye ◽  
Yaguo Li ◽  
Qiao Xu ◽  
Wei Yang ◽  
Chen Jiang
Keyword(s):  
Chemical Etching ◽  
Fused Silica ◽  
Laser Damage ◽  
Damage Resistance ◽  
Wet Chemical ◽  
Wet Chemical Etching

scholarly journals Argon plasma etching of fused silica substrates for manufacturing high laser damage resistance optical interference coatings

2017 ◽  
Vol 7 (10) ◽  
pp. 3598 ◽  
Author(s):  
Kęstutis Juškevičius ◽  
Rytis Buzelis ◽  
Giedrius Abromavičius ◽  
Romanas Samuilovas ◽  
Saulė Abbas ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Argon Plasma ◽  
Fused Silica ◽  
Laser Damage ◽  
Optical Interference ◽  
Damage Resistance ◽  
High Laser ◽  
Silica Substrates

scholarly journals Effects of deep wet etching in HF/HNO_3 and KOH solutions on the laser damage resistance and surface quality of fused silica optics at 351 nm

2017 ◽  
Vol 25 (5) ◽  
pp. 4607 ◽  
Author(s):  
Mathilde Pfiffer ◽  
Philippe Cormont ◽  
Evelyne Fargin ◽  
Bruno Bousquet ◽  
Marc Dussauze ◽  
...  
Keyword(s):  
Surface Quality ◽  
Fused Silica ◽  
Wet Etching ◽  
Laser Damage ◽  
Damage Resistance

The effect of dynamic etching on surface quality and laser damage resistance for fused silica optics

2017 ◽  
Author(s):  
Zhiqiang Wang ◽  
Hongwei Yan ◽  
Xiaodong Yuan ◽  
Yuan Li ◽  
Ke Yang ◽  
...  
Keyword(s):  
Surface Quality ◽  
Fused Silica ◽  
Laser Damage ◽  
Damage Resistance

Study of dust-pollution-induced laser damage on fused silica surface

2011 ◽  
Author(s):  
Xinda Zhou ◽  
Jin Huang ◽  
Fengrui Wang ◽  
Hongjie Liu ◽  
Xiaodong Jiang
Keyword(s):  
Silica Surface ◽  
Fused Silica ◽  
Laser Damage ◽  
Dust Pollution

scholarly journals The influence of CO2 laser local irradiation on the laser damage resistance of fused silica

2013 ◽  
Vol 62 (9) ◽  
pp. 094701
Author(s):  
Liu Chun-Ming ◽  
Yang Liang ◽  
Yan Zhong-Hua ◽  
Jiang Yong ◽  
Wang Hai-Jun ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Fused Silica ◽  
Laser Damage ◽  
Local Irradiation ◽  
Damage Resistance

scholarly journals Laser field manipulation and laser damage resistance property of nanotextures on fused silica optics

2020 ◽  
Vol 18 ◽  
pp. 103262
Author(s):  
Xin Ye ◽  
Xiheng Hu ◽  
Feng Tang ◽  
Jingjun Wu ◽  
Liming Yang ◽  
...  
Keyword(s):  
Laser Field ◽  
Fused Silica ◽  
Laser Damage ◽  
Damage Resistance ◽  
Resistance Property ◽  
Field Manipulation
Sign in / Sign up

Export Citation Format

Share Document