scholarly journals Characterisation of thin boron-doped diamond films using Raman spectroscopy and chemometrics

2019 ◽  
Vol 11 (5) ◽  
pp. 582-586 ◽  
Author(s):  
Peter Knittel ◽  
Robert Stach ◽  
Taro Yoshikawa ◽  
Lutz Kirste ◽  
Boris Mizaikoff ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Boron Concentration ◽  
Diamond Films ◽  
Raman Microscopy ◽  
Boron Doped Diamond ◽  
Chemometric Method ◽  
Boron Doped ◽  
Heavily Doped ◽  
Non Destructive

A non-destructive chemometric method to determine thickness and boron concentration of as-deposited, thin, heavily doped diamond films by Raman microscopy.

Study of polycrystalline boron-doped diamond films by Raman spectroscopy and optical absorption spectroscopy

2007 ◽  
Vol 52 (11) ◽  
pp. 1471-1474 ◽  
Author(s):  
V. A. Krivchenko ◽  
D. V. Lopaev ◽  
P. V. Minakov ◽  
V. G. Pirogov ◽  
A. T. Rakhimov ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Optical Absorption ◽  
Absorption Spectroscopy ◽  
Diamond Films ◽  
Optical Absorption Spectroscopy ◽  
Boron Doped Diamond ◽  
Boron Doped

Electrochemically induced surface modifications in boron-doped diamond films: a Raman spectroscopy study

2005 ◽  
Vol 482 (1-2) ◽  
pp. 311-317 ◽  
Author(s):  
P.C. Ricci ◽  
A. Anedda ◽  
C.M. Carbonaro ◽  
F. Clemente ◽  
R. Corpino
Keyword(s):  
Raman Spectroscopy ◽  
Diamond Films ◽  
Surface Modifications ◽  
Spectroscopy Study ◽  
Boron Doped Diamond ◽  
Boron Doped

Determination of Boron Concentration in Doped Diamond Films

2011 ◽  
Vol 1282 ◽  
Author(s):  
S.N. Demlow ◽  
T.A. Grotjohn ◽  
T. Hogan ◽  
M. Becker ◽  
J. Asmussen
Keyword(s):  
Boron Concentration ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Boron Doped Diamond ◽  
Dopant Activation ◽  
Boron Doped ◽  
Boron Dopant ◽  
Boron Acceptor

ABSTRACTThe electrical characteristics of high quality single crystal boron-doped diamond are studied. Samples are synthesized in a high power-density microwave plasma-assisted chemical vapor deposition (CVD) reactor at a pressure of 160 Torr. The boron-doped diamond films are grown using diborane in the feedgas at concentrations of 0-0.25 ppm, and are compared to those grown previously with 1-10 ppm. The boron acceptor concentration is investigated using infrared absorption, and compared to the boron concentration obtained by SIMS. A four point probe is used to study the conductivity. The temperature dependent conductivity is analyzed to determine the boron dopant activation energy.

Influence of boron concentration on the XPS spectra of the (100) surface of homoepitaxial boron-doped diamond films

2006 ◽  
Vol 203 (12) ◽  
pp. 3147-3151 ◽  
Author(s):  
S. Ghodbane ◽  
D. Ballutaud ◽  
A. Deneuville ◽  
C. Baron
Keyword(s):  
Boron Concentration ◽  
Diamond Films ◽  
Boron Doped Diamond ◽  
Xps Spectra ◽  
Boron Doped

TL, OSL, Raman spectroscopy and SEM characterization of boron doped diamond films

2005 ◽  
Vol 202 (11) ◽  
pp. 2154-2159 ◽  
Author(s):  
M. Pedroza-Montero ◽  
V. Chernov ◽  
B. Castañeda ◽  
R. Meléndrez ◽  
J. A. N. Gonçalves ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Diamond Films ◽  
Boron Doped Diamond ◽  
Boron Doped

Determination of atomic boron concentration in heavily boron-doped diamond by Raman spectroscopy

2019 ◽  
Vol 93 ◽  
pp. 54-58 ◽  
Author(s):  
V. Mortet ◽  
Z. Vlčková Živcová ◽  
A. Taylor ◽  
M. Davydová ◽  
O. Frank ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Boron Concentration ◽  
Boron Doped Diamond ◽  
Boron Doped

Growth and oxidation of boron-doped diamond films

1995 ◽  
Vol 10 (6) ◽  
pp. 1448-1454 ◽  
Author(s):  
E.N. Farabaugh ◽  
L. Robins ◽  
A. Feldman ◽  
Curtis E. Johnson
Keyword(s):  
Boron Concentration ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Boron Doping ◽  
Deposition Process ◽  
X Ray Diffraction ◽  
Boron Doped Diamond ◽  
Oxidation Rates ◽  
Boron Doped ◽  
Hot Filament

Boron-doped diamond films have been grown by the hot filament chemical vapor deposition process. The feed gas was a mixture of argon, bubbled through a solution of B2O3 in ethanol, and hydrogen. The highest growth rate was 0.7 μm/h. The boron concentration in the films depended on the concentration of B2O3 in the ethanol. The highest boron doping level, as measured by secondary ion mass spectroscopy, was 6300 atomic ppm. Raman spectroscopy and x-ray diffraction both confirmed the presence of crystalline diamond in the films. The frequency of the diamond Raman line decreased with increasing boron concentration. This shift may arise from an interaction of the charged carriers (holes) produced by the boron doping and the Raman-active optic phonon. The oxidation rates of doped and undoped films were measured by thermogravimetric analysis at 700 °C in flowing high purity oxygen. Films with a boron concentration of 6300 ppm oxidized at one-tenth the rate of undoped diamond. A layer of B2O3, detected on the surface of an oxidized B-doped film, is believed to act as a protective barrier that decreases the oxidation rate.

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