Influence of boron concentration on the XPS spectra of the (100) surface of homoepitaxial boron-doped diamond films

2006 ◽  
Vol 203 (12) ◽  
pp. 3147-3151 ◽  
Author(s):  
S. Ghodbane ◽  
D. Ballutaud ◽  
A. Deneuville ◽  
C. Baron
Keyword(s):  
Boron Concentration ◽  
Diamond Films ◽  
Boron Doped Diamond ◽  
Xps Spectra ◽  
Boron Doped

Determination of Boron Concentration in Doped Diamond Films

2011 ◽  
Vol 1282 ◽  
Author(s):  
S.N. Demlow ◽  
T.A. Grotjohn ◽  
T. Hogan ◽  
M. Becker ◽  
J. Asmussen
Keyword(s):  
Boron Concentration ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Boron Doped Diamond ◽  
Dopant Activation ◽  
Boron Doped ◽  
Boron Dopant ◽  
Boron Acceptor

ABSTRACTThe electrical characteristics of high quality single crystal boron-doped diamond are studied. Samples are synthesized in a high power-density microwave plasma-assisted chemical vapor deposition (CVD) reactor at a pressure of 160 Torr. The boron-doped diamond films are grown using diborane in the feedgas at concentrations of 0-0.25 ppm, and are compared to those grown previously with 1-10 ppm. The boron acceptor concentration is investigated using infrared absorption, and compared to the boron concentration obtained by SIMS. A four point probe is used to study the conductivity. The temperature dependent conductivity is analyzed to determine the boron dopant activation energy.

Comparison of the XPS spectra from homoepitaxial {111}, {100} and polycrystalline boron-doped diamond films

2010 ◽  
Vol 19 (5-6) ◽  
pp. 630-636 ◽  
Author(s):  
S. Ghodbane ◽  
D. Ballutaud ◽  
F. Omnès ◽  
C. Agnès
Keyword(s):  
Diamond Films ◽  
Boron Doped Diamond ◽  
Xps Spectra ◽  
Boron Doped

Growth and oxidation of boron-doped diamond films

1995 ◽  
Vol 10 (6) ◽  
pp. 1448-1454 ◽  
Author(s):  
E.N. Farabaugh ◽  
L. Robins ◽  
A. Feldman ◽  
Curtis E. Johnson
Keyword(s):  
Boron Concentration ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Boron Doping ◽  
Deposition Process ◽  
X Ray Diffraction ◽  
Boron Doped Diamond ◽  
Oxidation Rates ◽  
Boron Doped ◽  
Hot Filament

Boron-doped diamond films have been grown by the hot filament chemical vapor deposition process. The feed gas was a mixture of argon, bubbled through a solution of B2O3 in ethanol, and hydrogen. The highest growth rate was 0.7 μm/h. The boron concentration in the films depended on the concentration of B2O3 in the ethanol. The highest boron doping level, as measured by secondary ion mass spectroscopy, was 6300 atomic ppm. Raman spectroscopy and x-ray diffraction both confirmed the presence of crystalline diamond in the films. The frequency of the diamond Raman line decreased with increasing boron concentration. This shift may arise from an interaction of the charged carriers (holes) produced by the boron doping and the Raman-active optic phonon. The oxidation rates of doped and undoped films were measured by thermogravimetric analysis at 700 °C in flowing high purity oxygen. Films with a boron concentration of 6300 ppm oxidized at one-tenth the rate of undoped diamond. A layer of B2O3, detected on the surface of an oxidized B-doped film, is believed to act as a protective barrier that decreases the oxidation rate.

scholarly journals Characterisation of thin boron-doped diamond films using Raman spectroscopy and chemometrics

2019 ◽  
Vol 11 (5) ◽  
pp. 582-586 ◽  
Author(s):  
Peter Knittel ◽  
Robert Stach ◽  
Taro Yoshikawa ◽  
Lutz Kirste ◽  
Boris Mizaikoff ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Boron Concentration ◽  
Diamond Films ◽  
Raman Microscopy ◽  
Boron Doped Diamond ◽  
Chemometric Method ◽  
Boron Doped ◽  
Heavily Doped ◽  
Non Destructive

A non-destructive chemometric method to determine thickness and boron concentration of as-deposited, thin, heavily doped diamond films by Raman microscopy.

Stress study of HFCVD boron-doped diamond films by X-ray diffraction measurements

2001 ◽  
Vol 10 (3-7) ◽  
pp. 750-754 ◽  
Author(s):  
N.G. Ferreira ◽  
E. Abramof ◽  
E.J. Corat ◽  
N.F. Leite ◽  
V.J. Trava-Airoldi
Keyword(s):  
Diamond Films ◽  
X Ray Diffraction ◽  
Boron Doped Diamond ◽  
X Ray ◽  
Boron Doped ◽  
Stress Study

High-speed synthesis of heavily boron-doped diamond films by in-liquid microwave plasma CVD

2019 ◽  
Vol 92 ◽  
pp. 41-46 ◽  
Author(s):  
Yohei Harada ◽  
Ryota Hishinuma ◽  
Nicolae Spătaru ◽  
Yusei Sakurai ◽  
Kazuya Miyasaka ◽  
...  
Keyword(s):  
High Speed ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Boron Doped Diamond ◽  
Boron Doped ◽  
Microwave Plasma Cvd

scholarly journals Flux pinning and improved critical current density in superconducting boron doped diamond films

2018 ◽  
Vol 2 (4) ◽  
pp. 045015 ◽  
Author(s):  
Dinesh Kumar ◽  
Shibnath Samanta ◽  
K Sethupathi ◽  
M S Ramachandra Rao
Keyword(s):  
Critical Current Density ◽  
Critical Current ◽  
Current Density ◽  
Flux Pinning ◽  
Diamond Films ◽  
Boron Doped Diamond ◽  
Boron Doped

Secondary Electron Emission from Boron Doped Diamond Films Grown by MPCVD

2013 ◽  
Vol 28 (5) ◽  
pp. 688-692
Author(s):  
丁明清 DING Ming-qing ◽  
李莉莉 LI Li-li ◽  
冯进军 FENG Jin-jun
Keyword(s):  
Electron Emission ◽  
Secondary Electron ◽  
Secondary Electron Emission ◽  
Diamond Films ◽  
Boron Doped Diamond ◽  
Boron Doped
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