Selective-area lateral epitaxial overgrowth of SiC by controlling the supersaturation in sublimation growth
We realized the selective-area lateral epitaxial overgrowth of SiC on a 6H-SiC (0001) seed crystal by controlling the supersaturation in sublimation growth.
2001 ◽
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1998 ◽
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1998 ◽
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2021 ◽
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