Selective-area and lateral epitaxial overgrowth of III–N materials by metal organic chemical vapor deposition

1998 ◽  
Vol 73 (3) ◽  
pp. 333-335 ◽  
Author(s):  
J. Park ◽  
P. A. Grudowski ◽  
C. J. Eiting ◽  
R. D. Dupuis
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Lateral Epitaxial Overgrowth ◽  
Selective Area ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

In-situ mask removal in selective area epitaxy using metal organic chemical vapor deposition

2005 ◽  
Vol 277 (1-4) ◽  
pp. 97-103 ◽  
Author(s):  
S. Birudavolu ◽  
S.Q. Luong ◽  
N. Nuntawong ◽  
Y.C. Xin ◽  
C.P. Hains ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Selective Area Epitaxy ◽  
Selective Area ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

High-Quality InAsSb Nanowires Grown by Catalyst-Free Selective-Area Metal–Organic Chemical Vapor Deposition

Nano Letters ◽  
2015 ◽  
Vol 15 (10) ◽  
pp. 6614-6619 ◽  
Author(s):  
Alan C. Farrell ◽  
Wook-Jae Lee ◽  
Pradeep Senanayake ◽  
Michael A. Haddad ◽  
Sergey V. Prikhodko ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
High Quality ◽  
Catalyst Free ◽  
Selective Area ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Fabrication of InGaAs Strained Quantum Wire Structures Using Selective-Area Metal-Organic Chemical Vapor Deposition Growth

1993 ◽  
Vol 32 (Part 2, No. 10A) ◽  
pp. L1377-L1379 ◽  
Author(s):  
Taro Arakawa ◽  
Shiro Tsukamoto ◽  
Yasushi Nagamune ◽  
Masao Nishioka ◽  
Jin-Hee Lee ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Quantum Wire ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Chemical Vapor Deposition Growth ◽  
Selective Area ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
Sign in / Sign up

Export Citation Format

Share Document