Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation
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Herein, we demonstrate a powerful technique, known as reactive gas-timing (RGT) rf magnetron sputtering, to fabricate high quality Zn3N2 thin films at room temperature without applying any additional energy sources.
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1993 ◽
Vol 11
(2)
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pp. 307-313
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2013 ◽
Vol 740-742
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pp. 235-238
1997 ◽
Vol 386
(1-3)
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pp. 231-240
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