scholarly journals Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays

2015 ◽  
Vol 1 (1) ◽  
Author(s):  
Masayoshi Esashi ◽  
Akira Kojima ◽  
Naokatsu Ikegami ◽  
Hiroshi Miyaguchi ◽  
Nobuyoshi Koshida
Keyword(s):  
Electron Beam ◽  
Nanocrystalline Silicon ◽  
Massively Parallel ◽  
Direct Write ◽  
Active Matrix ◽  
Electron Emitter

Active-matrix nc-Si electron emitter array for massively parallel direct-write electron-beam system

2012 ◽  
Author(s):  
N. Ikegami ◽  
T. Yoshida ◽  
A. Kojima ◽  
H. Ohyi ◽  
N. Koshida ◽  
...  
Keyword(s):  
Electron Beam ◽  
Massively Parallel ◽  
Direct Write ◽  
Active Matrix ◽  
Electron Emitter ◽  
Beam System ◽  
Emitter Array

Simulation analysis of a miniaturized electron optics of the massively parallel electron-beam direct-write (MPEBDW) for multi-column system

2017 ◽  
Author(s):  
Akira Kojima ◽  
Naokatsu Ikegami ◽  
Hiroshi Miyaguchi ◽  
Takashi Yoshida ◽  
Ryutaro Suda ◽  
...  
Keyword(s):  
Electron Beam ◽  
Simulation Analysis ◽  
Massively Parallel ◽  
Electron Optics ◽  
Direct Write ◽  
Column System

Fabrication of Pierce-Type Nanocrystalline Si Electron-Emitter Array for Massively Parallel Electron Beam Lithography

2014 ◽  
Vol 134 (6) ◽  
pp. 146-153 ◽  
Author(s):  
Hitoshi Nishino ◽  
Shinya Yoshida ◽  
Akira Kojima ◽  
Nokatsu Ikegami ◽  
Shuji Tanaka ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Massively Parallel ◽  
Electron Emitter ◽  
Emitter Array ◽  
Nanocrystalline Si

ELECTRON BEAM DIRECT WRITE EFFECTS ON CMOS DEVICES

1988 ◽  
Vol 49 (C4) ◽  
pp. C4-291-C4-294
Author(s):  
K. BARLOW
Keyword(s):  
Electron Beam ◽  
Direct Write
Sign in / Sign up

Export Citation Format

Share Document