Development of ballistic hot electron emitter and its applications to parallel processing: active-matrix massive direct-write lithography in vacuum and thin films deposition in solutions

2015 ◽  
Author(s):  
N. Koshida ◽  
A. Kojima ◽  
N. Ikegami ◽  
R. Suda ◽  
M. Yagi ◽  
...  
Keyword(s):  
Thin Films ◽  
Parallel Processing ◽  
Direct Write ◽  
Hot Electron ◽  
Active Matrix ◽  
Electron Emitter

Active-matrix nc-Si electron emitter array for massively parallel direct-write electron-beam system

2012 ◽  
Author(s):  
N. Ikegami ◽  
T. Yoshida ◽  
A. Kojima ◽  
H. Ohyi ◽  
N. Koshida ◽  
...  
Keyword(s):  
Electron Beam ◽  
Massively Parallel ◽  
Direct Write ◽  
Active Matrix ◽  
Electron Emitter ◽  
Beam System ◽  
Emitter Array

scholarly journals Effects on Hot Electron Emitter for Excess Energy of Thin Films Formation by Ion Plating Process

2016 ◽  
Vol 80 (12) ◽  
pp. 759-763
Author(s):  
Akitaka Sakai ◽  
Chonlawich Niyomwaitaya ◽  
Rintaro Yamamoto ◽  
Miki Shinooka ◽  
Yoshihito Matsumura
Keyword(s):  
Thin Films ◽  
Excess Energy ◽  
Hot Electron ◽  
Ion Plating ◽  
Electron Emitter

Effect of interface band structure on hot-electron attenuation lengths in Au thin films

2008 ◽  
Vol 77 (3) ◽  
Author(s):  
A. J. Stollenwerk ◽  
E. J. Spadafora ◽  
J. J. Garramone ◽  
R. J. Matyi ◽  
R. L. Moore ◽  
...  
Keyword(s):  
Thin Films ◽  
Band Structure ◽  
Hot Electron ◽  
Au Thin Films
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