Assembly of Sub-10-nm Block Copolymer Patterns with Mixed Morphology and Period Using Electron Irradiation and Solvent Annealing
Keyword(s):
2015 ◽
Vol 216
(22)
◽
pp. 2154-2160
◽
2014 ◽
Vol 52
(13)
◽
pp. 900-906
◽