Bioactive Templates Fabricated by Low-Energy Electron Beam Lithography of Self-Assembled Monolayers

C. K. Harnett; K. M. Satyalakshmi; H. G. Craighead

doi:10.1021/la0009543

Bioactive Templates Fabricated by Low-Energy Electron Beam Lithography of Self-Assembled Monolayers

Langmuir ◽

10.1021/la0009543 ◽

2001 ◽

Vol 17 (1) ◽

pp. 178-182 ◽

Cited By ~ 71

Author(s):

C. K. Harnett ◽

K. M. Satyalakshmi ◽

H. G. Craighead

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Low Energy Electron ◽

Self Assembled

Download Full-text

Low-energy electron-beam patterning of amine-functionalized self-assembled monolayers

Applied Physics Letters ◽

10.1063/1.126378 ◽

2000 ◽

Vol 76 (17) ◽

pp. 2466-2468 ◽

Cited By ~ 73

Author(s):

C. K. Harnett ◽

K. M. Satyalakshmi ◽

H. G. Craighead

Keyword(s):

Electron Beam ◽

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Amine Functionalized ◽

Assembled Monolayers ◽

Low Energy Electron ◽

Self Assembled ◽

Electron Beam Patterning

Download Full-text

Generation of Surface Amino Groups on Aromatic Self-Assembled Monolayers by Low Energy Electron Beams—A First Step Towards Chemical Lithography

Advanced Materials ◽

10.1002/(sici)1521-4095(200006)12:11<805::aid-adma805>3.0.co;2-0 ◽

2000 ◽

Vol 12 (11) ◽

pp. 805-808 ◽

Cited By ~ 134

Author(s):

W. Eck ◽

V. Stadler ◽

W. Geyer ◽

M. Zharnikov ◽

A. Gölzhäuser ◽

...

Keyword(s):

Electron Beams ◽

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Amino Groups ◽

Assembled Monolayers ◽

Low Energy Electron ◽

Self Assembled

Download Full-text

Formation and Characterization of Self-assembled Monolayers of Octadecyltrimethoxysilane on Chromium: Application in Low-Energy Electron Lithography

Langmuir ◽

10.1021/la970438l ◽

1998 ◽

Vol 14 (2) ◽

pp. 342-346 ◽

Cited By ~ 29

Author(s):

R. Hild ◽

C. David ◽

H. U. Müller ◽

B. Völkel ◽

D. R. Kayser ◽

...

Keyword(s):

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Low Energy Electron ◽

Self Assembled ◽

Electron Lithography

Download Full-text

Low energy electron interactions with 1-decanethiol self-assembled monolayers on Au(111)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5098946 ◽

2019 ◽

Vol 37 (5) ◽

pp. 051401 ◽

Cited By ~ 1

Author(s):

Jodi Grzeskowiak ◽

Carl A. Ventrice

Keyword(s):

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Low Energy Electron ◽

Self Assembled ◽

Electron Interactions

Download Full-text

Bond-selective dissociation of alkanethiol based self-assembled monolayers adsorbed on gold substrates, using low-energy electron beams

The Journal of Chemical Physics ◽

10.1063/1.475780 ◽

1998 ◽

Vol 108 (9) ◽

pp. 3750-3764 ◽

Cited By ~ 100

Author(s):

C. Olsen ◽

P. A. Rowntree

Keyword(s):

Electron Beams ◽

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Gold Substrates ◽

Selective Dissociation ◽

Assembled Monolayers ◽

Low Energy Electron ◽

Self Assembled

Download Full-text

The Mechanism of Hydrogen Formation Induced by Low-Energy Electron Irradiation of Hexadecanethiol Self-Assembled Monolayers

The Journal of Physical Chemistry B ◽

10.1021/jp050817k ◽

2005 ◽

Vol 109 (26) ◽

pp. 12927-12934 ◽

Cited By ~ 10

Author(s):

Etienne Garand ◽

Paul A. Rowntree

Keyword(s):

Electron Irradiation ◽

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Hydrogen Formation ◽

Assembled Monolayers ◽

Low Energy Electron ◽

Self Assembled

Download Full-text

Patterning on Self-Assembled Monolayers by Low-Energy Electron-Beam Irradiation and its Vertical Amplification with Atom Transfer Radical Polymerization

Langmuir ◽

10.1021/la027055u ◽

2003 ◽

Vol 19 (10) ◽

pp. 4519-4522 ◽

Cited By ~ 26

Author(s):

Il Sang Maeng ◽

Joon Won Park

Keyword(s):

Electron Beam ◽

Atom Transfer Radical Polymerization ◽

Radical Polymerization ◽

Electron Beam Irradiation ◽

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Beam Irradiation ◽

Assembled Monolayers ◽

Low Energy Electron

Download Full-text

Oxygen gas assisted electron beam lithography in organosilane self-assembled monolayers

Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. ◽

10.1109/imnc.2004.245792 ◽

2004 ◽

Author(s):

M. Yamaguchi ◽

N. Saito ◽

O. Takai

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Oxygen Gas ◽

Self Assembled

Download Full-text

A study of line edge roughness in chemically amplified resist for low energy electron-beam lithography

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) ◽

10.1109/imnc.2001.984209 ◽

2002 ◽

Author(s):

T. Nakasugi ◽

A. Ando ◽

R. Inanami ◽

N. Sasaki ◽

K. Sugihara

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Low Energy ◽

Energy Electron ◽

Line Edge Roughness ◽

Chemically Amplified ◽

Edge Roughness ◽

Chemically Amplified Resist ◽

Low Energy Electron

Download Full-text

Application of the partial wave expansion method in 3-D low energy electron beam lithography simulation

Microelectronic Engineering ◽

10.1016/s0167-9317(01)00499-3 ◽

2001 ◽

Vol 57-58 ◽

pp. 297-302 ◽

Cited By ~ 4

Author(s):

X. Zianni ◽

D. Velessiotis ◽

N. Glezos ◽

K.N. Trohidou

Keyword(s):

Electron Beam ◽

Partial Wave ◽

Electron Beam Lithography ◽

Expansion Method ◽

Low Energy ◽

Energy Electron ◽

Partial Wave Expansion ◽

Lithography Simulation ◽

Wave Expansion ◽

Low Energy Electron

Download Full-text