scholarly journals A High Efficiency Surface Modification Process for Multiwalled Carbon Nanotubes by Electron Cyclotron Resonance Plasma

2008 ◽  
Vol 112 (47) ◽  
pp. 18431-18436 ◽  
Author(s):  
Wen-Shou Tseng ◽  
Chyuan-Yow Tseng ◽  
Pi-Kai Chuang ◽  
An-Ya Lo ◽  
Cheng-Tzu Kuo
Keyword(s):  
Carbon Nanotubes ◽  
Surface Modification ◽  
Multiwalled Carbon Nanotubes ◽  
Cyclotron Resonance ◽  
High Efficiency ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Multiwalled Carbon ◽  
Modification Process ◽  
Resonance Plasma

Surface Modification of Indium-tin Oxide Thin Films by Electron Cyclotron Resonance Plasma Treatment

Shinku ◽  
2003 ◽  
Vol 46 (5) ◽  
pp. 469-472
Author(s):  
Yoshiharu KAKEHI ◽  
Kazuo SATOH ◽  
Akihide KITABATAKE ◽  
Soichi OGAWA ◽  
Yoshiyuki NAKAJIMA ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Modification ◽  
Plasma Treatment ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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