Recombination Reactions of Oxygen Atoms on an Anodized Aluminum Plasma Reactor Wall, Studied by a Spinning Wall Method

2005 ◽  
Vol 109 (44) ◽  
pp. 20989-20998 ◽  
Author(s):  
P. F. Kurunczi ◽  
J. Guha ◽  
V. M. Donnelly
Keyword(s):  
Plasma Reactor ◽  
Reactor Wall ◽  
Anodized Aluminum ◽  
Aluminum Plasma ◽  
Recombination Reactions ◽  
Wall Method ◽  
Oxygen Atoms

Plasma-Reactor Wall Interactions: Bromine-Fluorine Chemistry Duality in an Industrial Dry Etch Process

2015 ◽  
Vol 1803 ◽  
Author(s):  
M. Rizquez ◽  
A. Roussy ◽  
B. Bortoloti ◽  
J. Pinaton ◽  
Y. Goasduff
Keyword(s):  
Plasma Reactor ◽  
Industrial Process ◽  
Etching Process ◽  
Reactor Wall ◽  
Silicon Etching ◽  
Fluorine Chemistry ◽  
Starting Point ◽  
Dry Etch ◽  
Over Time ◽  
Wall Interactions

ABSTRACTThe purpose of the present paper is to investigate the composition of the coating formed on the plasma reactor walls after an industrial process which is divided into two steps, where the chemistries used are CF4/CH2F2 followed by HBr/O2. Since Fluorine traces have been detected through the plasma and over the wafer even during the second chemistry, investigations of the Br-F chemistry duality for a new silicon etching process have been performed in order to see the reactions which are taking place inside of the reactor. The understanding of these formations is really important to avoid process instabilities and get better performance of the transistors. The coating on the walls after the process and after the cleaning between wafers has been characterized in order to figure out the level of F traces after each step and to understand the reminiscence of this element over time. This study is the starting point to propose a modification on the Waferless AutoClean (WAC) used nowadays in an industrial process.

scholarly journals Numerical modeling of disperse material evaporation in axisymmetric thermal plasma reactor

2003 ◽  
Vol 7 (1) ◽  
pp. 63-99 ◽  
Author(s):  
Predrag Stefanovic ◽  
Dejan Cvetinovic ◽  
Goran Zivkovic ◽  
Simeon Oka ◽  
Pavle Pavlovic
Keyword(s):  
Mass Transfer ◽  
Heat And Mass Transfer ◽  
Thermal Plasma ◽  
Gas Flow ◽  
Disperse Material ◽  
Plasma Reactor ◽  
Solid Particles ◽  
Reactor Wall ◽  
Particle Injection ◽  
Injection Angle

A numerical 3D Euler-Lagrangian stochastic-deterministic (LSD) model of two-phase flow laden with solid particles was developed. The model includes the relevant physical effects, namely phase interaction, panicle dispersion by turbulence, lift forces, particle-particle collisions, particle-wall collisions, heat and mass transfer between phases, melting and evaporation of particles, vapour diffusion in the gas flow. It was applied to simulate the processes in thermal plasma reactors, designed for the production of the ceramic powders. Paper presents results of extensive numerical simulation provided (a) to determine critical mechanism of interphase heat and mass transfer in plasma flows, (b) to show relative influence of some plasma reactor parameters on solid precursor evaporation efficiency: 1 - inlet plasma temperature, 2 - inlet plasma velocity, 3 - particle initial diameter, 4 - particle injection angle a, and 5 - reactor wall temperature, (c) to analyze the possibilities for high evaporation efficiency of different starting solid precursors (Si, Al, Ti, and B2O3 powder), and (d) to compare different plasma reactor configurations in conjunction with disperse material evaporation efficiency.

Synthesis of SiO2 Nanoparticles in RF Plasma Reactors: Effect of Feed Rate and Quench Gas Injection

2006 ◽  
Vol 4 (1) ◽  
Author(s):  
Behnam Mostajeran Goortani ◽  
Norma Mendoza ◽  
Pierre Proulx
Keyword(s):  
Plasma Reactor ◽  
Sio2 Nanoparticles ◽  
Synthesis Process ◽  
Rf Plasma ◽  
Particle Model ◽  
Reactor Wall ◽  
Equivalent Diameter ◽  
Inductively Coupled ◽  
Laser Diffractometry ◽  
Rf Plasma Reactors

Nanoparticles of SiO2 have been produced in an inductively coupled thermal plasma reactor. The resulting nanoparticles were characterized based on their morphology and size distribution. Scanning electron microscopy, nitrogen absorption (BET method), laser diffractometry and X-ray diffraction techniques were used to characterize and to measure the equivalent diameter (D(1,0), D(3,2) and D(4,3)) of the resulting nanopowders. The computational fluid dynamics (CFD) software FluentTM 6.1 with the Fine Particle Model (FPMTM) was used to simulate the whole synthesis process. The nanoparticles of SiO2 produced at the exit (filter) and on the reactor wall had primary particles diameter between 10-300 nm while the aggregates were of much larger size, between 1 and 4 micrometers. The simulation predictions were used to gain more insight into the experimental results.

Laser‐induced fluorescence of oxygen atoms in a plasma reactor

1992 ◽  
Vol 60 (1) ◽  
pp. 35-37 ◽  
Author(s):  
G. Hancock ◽  
M. J. Toogood
Keyword(s):  
Plasma Reactor ◽  
Laser Induced Fluorescence ◽  
Oxygen Atoms

In-Situ Surface Recombination Measurements of Oxygen Atoms on Anodized Aluminum in an Oxygen Plasma

2008 ◽  
Vol 112 (24) ◽  
pp. 8963-8968 ◽  
Author(s):  
Joydeep Guha ◽  
Peter Kurunczi ◽  
Luc Stafford ◽  
Vincent M. Donnelly ◽  
Yi-Kang Pu
Keyword(s):  
Oxygen Plasma ◽  
Surface Recombination ◽  
Anodized Aluminum ◽  
Oxygen Atoms
Sign in / Sign up

Export Citation Format

Share Document