Mass and Auger electron spectroscopy studies of the interactions of atomic and molecular chlorine on a plasma reactor wall

2008 ◽  
Vol 103 (1) ◽  
pp. 013306 ◽  
Author(s):  
Joydeep Guha ◽  
Vincent M. Donnelly ◽  
Yi-Kang Pu
2002 ◽  
Vol 507-510 ◽  
pp. 170-174 ◽  
Author(s):  
A.A. Wronkowska ◽  
A. Bukaluk ◽  
A. Wronkowski ◽  
M. Trzciński ◽  
F. Firszt ◽  
...  

1973 ◽  
Vol 17 ◽  
pp. 498-508
Author(s):  
K. Hayakawa ◽  
H. Okano ◽  
S. Kawase ◽  
S. Yamamoto

AbstractAn electron probe Auger emission microanalyzer has been constructed. The instrument is composed of an electromagnetic focussing primary probe column and a cylindrical mirror electron energy analyzer. By using this instrument, Auger electron spectroscopy studies have been carried out in the modes of both emission microanalysis and emission micrograph. The feasibility o£ this method is investigated through its application to the study of iron surface.


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