Mass and Auger electron spectroscopy studies of the interactions of atomic and molecular chlorine on a plasma reactor wall
1998 ◽
Vol 16
(2)
◽
pp. 413-418
◽
1987 ◽
Vol 153
(1-3)
◽
pp. 149-157
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Keyword(s):
1992 ◽
Vol 10
(4)
◽
pp. 2822-2825
◽
Keyword(s):
1989 ◽
Vol 8
(3)
◽
pp. 367-369
◽