Reactive Deposition of Conformal Ruthenium Films from Supercritical Carbon Dioxide

2006 ◽  
Vol 18 (24) ◽  
pp. 5652-5658 ◽  
Author(s):  
Adam O'Nei ◽  
James J. Watkins
2000 ◽  
Vol 12 (9) ◽  
pp. 2625-2631 ◽  
Author(s):  
Jason M. Blackburn ◽  
David P. Long ◽  
James J. Watkins

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