UV Laser Photolysis of Disiloxanes for Chemical Vapor Deposition of Nano-Textured Silicones

2002 ◽  
Vol 14 (1) ◽  
pp. 144-153 ◽  
Author(s):  
Josef Pola ◽  
Anna Galíková ◽  
Aftanas Galík ◽  
Vratislav Blechta ◽  
Zdeněk Bastl ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Photolysis ◽  
Uv Laser

scholarly journals Effects of Laser Photolysis of Hydrocarbons at 193 and 248 nm on Chemical Vapor Deposition of Diamond Films

2018 ◽  
Vol 18 (4) ◽  
pp. 2458-2466 ◽  
Author(s):  
Loic Constantin ◽  
Lisha Fan ◽  
Clio Azina ◽  
Kamran Keramatnejad ◽  
Jean-Francois Silvain ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Laser Photolysis

Gas Phase Reactions Relevant to Chemical Vapor Deposition: Optical Diagnostics

1989 ◽  
Vol 168 ◽  
Author(s):  
D. Burgess
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical Emission ◽  
Laser Photolysis ◽  
Particle Nucleation ◽  
Gas Phase Reactions ◽  
Decomposition Processes ◽  
Rate Of Reaction

AbstractLaser photolysis, optical emission, and laser-induced fluorescence (LIF) were used to investigate laser driven decomposition processes in the gas phase pertaining to the systems: SiH4 → Si (s) and SiH4 → NH3 → Si3N4 (s). These processes are important to silicon/ silicon-nitride chemical vapor deposition, flame-driven gas phase silicon-particle nucleation, and laser-induced processes for materials fabrication. UV laser photolysis was used to generate SiHx and NHx species from silane and ammonia. A number of photofragments were identified by emission from excited states. The rate of reaction of NH2 with silane was measured using LIF to detect NH2 as a function of time following photolysis of ammonia

Roles of Gas Phase and Surface Photolysis in Laser Chemical Vapor Deposition from Fe(CO)5

1989 ◽  
Vol 158 ◽  
Author(s):  
Xin Xu ◽  
J.I. Steinfeld
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Photolysis ◽  
Chemical State ◽  
Xps Analysis ◽  
Laser Chemical Vapor Deposition ◽  
Iron Films

ABSTRACTThe chemical state of the carbon and oxygen incorporated in iron films formed by laser photolysis of Fe(CO)5 has been examined by profiling XPS analysis. A significant portion of the codeposited CO is photodissociated at the growing surface.

scholarly journals Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films

2017 ◽  
Vol 7 (4) ◽  
pp. 17177-17177 ◽  
Author(s):  
Li-Sha Fan ◽  
Loic Constantin ◽  
Da-wei Li ◽  
Lei Liu ◽  
Kamran Keramatnejad ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Laser Photolysis ◽  
Ultraviolet Laser ◽  
Nondiamond Carbon
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