Pulsed UV laser Raman spectroscopy of silane in a linear‐flow chemical vapor deposition reactor
2011 ◽
Vol 264-265
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pp. 837-842
2010 ◽
Vol 123-125
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pp. 799-802
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2006 ◽
Vol 514-516
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pp. 475-482
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1999 ◽
Vol 146
(8)
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pp. 2901-2905
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2009 ◽
Vol 48
(13)
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pp. 5969-5974
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