Roles of Gas Phase and Surface Photolysis in Laser Chemical Vapor Deposition from Fe(CO)5

1989 ◽  
Vol 158 ◽  
Author(s):  
Xin Xu ◽  
J.I. Steinfeld
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Photolysis ◽  
Chemical State ◽  
Xps Analysis ◽  
Laser Chemical Vapor Deposition ◽  
Iron Films

ABSTRACTThe chemical state of the carbon and oxygen incorporated in iron films formed by laser photolysis of Fe(CO)5 has been examined by profiling XPS analysis. A significant portion of the codeposited CO is photodissociated at the growing surface.

Gas Phase Reactions Relevant to Chemical Vapor Deposition: Optical Diagnostics

1989 ◽  
Vol 168 ◽  
Author(s):  
D. Burgess
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical Emission ◽  
Laser Photolysis ◽  
Particle Nucleation ◽  
Gas Phase Reactions ◽  
Decomposition Processes ◽  
Rate Of Reaction

AbstractLaser photolysis, optical emission, and laser-induced fluorescence (LIF) were used to investigate laser driven decomposition processes in the gas phase pertaining to the systems: SiH4 → Si (s) and SiH4 → NH3 → Si3N4 (s). These processes are important to silicon/ silicon-nitride chemical vapor deposition, flame-driven gas phase silicon-particle nucleation, and laser-induced processes for materials fabrication. UV laser photolysis was used to generate SiHx and NHx species from silane and ammonia. A number of photofragments were identified by emission from excited states. The rate of reaction of NH2 with silane was measured using LIF to detect NH2 as a function of time following photolysis of ammonia

scholarly journals Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

2017 ◽  
Vol 121 (47) ◽  
pp. 26465-26471 ◽  
Author(s):  
Mewlude Imam ◽  
Laurent Souqui ◽  
Jan Herritsch ◽  
Andreas Stegmüller ◽  
Carina Höglund ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermal Chemical Vapor Deposition ◽  
Gas Phase Chemistry ◽  
Phase Chemistry
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