Spectroscopic Investigation of the Synthesis of Thin Silicon Nitride Films on Silicon Single-Crystal Wafers via Ammonia-Assisted Pyrolysis of Organosilicon Polymers

2001 ◽  
Vol 13 (2) ◽  
pp. 655-661 ◽  
Author(s):  
Mihai Scarlete ◽  
Nancy McCourt ◽  
Ian S. Butler ◽  
John F. Harrod
Keyword(s):  
Silicon Nitride ◽  
Single Crystal ◽  
Spectroscopic Investigation ◽  
Silicon Single Crystal ◽  
Silicon Nitride Films ◽  
Thin Silicon ◽  
Organosilicon Polymers

ChemInform Abstract: VERY THIN SILICON NITRIDE FILMS GROWN BY DIRECT THERMAL REACTION WITH NITROGEN

1978 ◽  
Vol 9 (28) ◽  
Author(s):  
T. ITO ◽  
S. HIJIYA ◽  
T. NOZAKI ◽  
H. ARAKAWA ◽  
M. SHINODA ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Thermal Reaction ◽  
Silicon Nitride Films ◽  
Thin Silicon

Ultra thin silicon nitride films on Si(100) studied with core level photoemission

2008 ◽  
Vol 602 (13) ◽  
pp. 2315-2324 ◽  
Author(s):  
A. Bahari ◽  
P. Morgen ◽  
Z.S. Li
Keyword(s):  
Silicon Nitride ◽  
Core Level ◽  
Silicon Nitride Films ◽  
Thin Silicon

Density of as-deposited and annealed thin silicon nitride films

1993 ◽  
Vol 26 (4) ◽  
pp. 713-716 ◽  
Author(s):  
J C Bruyere ◽  
C Savall ◽  
B Reynes ◽  
M Brunel ◽  
L Ortega
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Thin Silicon

POTENTIOSTATIC TESTING OF THIN SILICON NITRIDE FILMS

1995 ◽  
Vol 137 (1) ◽  
pp. 23-32
Author(s):  
R. ULRICH ◽  
G. ZHAO ◽  
W. BROWN
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Thin Silicon

Thin silicon nitride films to increase resolution in e-beam lithography

1993 ◽  
Author(s):  
Elizabeth A. Dobisz ◽  
Christie R. Marrian ◽  
R. E. Salvino ◽  
Mario G. Ancona ◽  
Kee W. Rhee ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Thin Silicon

Conduction Mechanisms in Very Thin Silicon Nitride Films

1973 ◽  
Vol 120 (3) ◽  
pp. 423 ◽  
Author(s):  
Juan H. Sanchez-Lassise ◽  
J. R. Yeargan
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Conduction Mechanisms ◽  
Thin Silicon

Synthesis of Silicon Nitride Whiskers by Microwave Heating

1998 ◽  
Vol 547 ◽  
Author(s):  
S. Gedevanishvili ◽  
K. Cherian ◽  
D. Agrawal ◽  
R. Roy
Keyword(s):  
Silicon Nitride ◽  
Single Crystal ◽  
Microwave Heating ◽  
Polycrystalline Silicon ◽  
Silicon Powder ◽  
Silicon Single Crystal ◽  
Optimum Temperature ◽  
Solid Reaction ◽  
Powder Compacts ◽  
Microstructural Data

AbstractWhiskers of silicon nitride were synthesized by heating silicon powder compacts, silicon single crystal and polycrystalline silicon in microwave in the presence of flowing forming gas or nitrogen. Various gas compositions and form of silicon used resulted in different whisker morphologies. Silicon powder as starting material leads to the formation of needle-like whiskers while silicon single crystal and polycrystalline silicon led to the formation of wool-like and web-like structures respectively. Length of the whiskers apparently depends on the holding time at the optimum temperature ~1350°C; whiskers up to 250 micrometers in length may be grown in 30 minutes. Microstructural data suggest that the silicon nitride whiskers form through gas-solid reaction and vapor-solid mechanism.

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