Effect of substrate temperature on microstructure and optical properties of hydrogenated nanocrystalline Si thin films grown by plasma enhanced chemical vapor deposition
2009 ◽
Vol 6
(S1)
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pp. S722-S726
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Keyword(s):
2011 ◽
Vol 257
(9)
◽
pp. 3998-4003
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Keyword(s):
2008 ◽
2012 ◽
Vol 24
(4)
◽
pp. 1361-1368
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2014 ◽
Vol 53
(5S1)
◽
pp. 05FB17
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Keyword(s):
2003 ◽
Vol 23
(6-8)
◽
pp. 1013-1016
◽
Keyword(s):
2006 ◽
Vol 35
(8)
◽
pp. 1680-1684
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