Effect of Substrate Temperature and RF Biasing on the Optical Properties of Titania-Like Thin Films Obtained by Plasma Enhanced Chemical Vapor Deposition

Axel Sonnenfeld; Philipp Rudolf von Rohr

doi:10.1002/ppap.200931803

Effect of Substrate Temperature and RF Biasing on the Optical Properties of Titania-Like Thin Films Obtained by Plasma Enhanced Chemical Vapor Deposition

Plasma Processes and Polymers ◽

10.1002/ppap.200931803 ◽

2009 ◽

Vol 6 (S1) ◽

pp. S722-S726 ◽

Cited By ~ 9

Author(s):

Axel Sonnenfeld ◽

Philipp Rudolf von Rohr

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Substrate Temperature ◽

Vapor Deposition ◽

Chemical Vapor

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Effect of substrate temperature on microstructure and optical properties of hydrogenated nanocrystalline Si thin films grown by plasma enhanced chemical vapor deposition

Solar Energy ◽

10.1016/j.solener.2014.06.024 ◽

2014 ◽

Vol 108 ◽

pp. 126-134 ◽

Cited By ~ 15

Author(s):

Sana Ben Amor ◽

Malek Atyaoui ◽

Rabaa Bousbih ◽

Ikbel Haddadi ◽

Wissem Dimassi ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Substrate Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Nanocrystalline Si

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Growth Behavior, Nucleation Control and Excellent Optical Properties of Atomically Thin WS2 Thin Films Processed via Gas-phase Chemical Vapor Deposition

Applied Surface Science ◽

10.1016/j.apsusc.2021.150908 ◽

2021 ◽

pp. 150908

Author(s):

Nitin Babu Shinde ◽

Beo Deul Ryu ◽

Chang-Hee Hong ◽

Bellarmine Francis ◽

S. Chandramohan ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Growth Behavior ◽

Phase Chemical

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Microstructure and Optical Properties of Al[sub x]Ga[sub 1−x]N∕GaN Heterostructure Thin Films Grown on Si(111) Substrate by Plasma Assisted Metalorganic Chemical Vapor Deposition Method

10.1063/1.2906048 ◽

2008 ◽

Author(s):

H. Sutanto ◽

A. Subagio ◽

E. Supriyanto ◽

P. Arifin ◽

M. Budiman ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Gan Heterostructure ◽

Metalorganic Chemical

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Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-012-0934-z ◽

2012 ◽

Vol 24 (4) ◽

pp. 1361-1368 ◽

Cited By ~ 16

Author(s):

Fatemeh Shariatmadar Tehrani ◽

Boon Tong Goh ◽

Muhamad Rasat Muhamad ◽

Saadah Abdul Rahman

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Structural And Optical Properties

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Preparation of yttrium iron garnet thin films by mist chemical vapor deposition method and their magneto-optical properties

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.05fb17 ◽

2014 ◽

Vol 53 (5S1) ◽

pp. 05FB17 ◽

Cited By ~ 7

Author(s):

Situ Yao ◽

Takashi Sato ◽

Kentaro Kaneko ◽

Shunsuke Murai ◽

Koji Fujita ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Yttrium Iron Garnet ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Yttrium Iron ◽

Iron Garnet

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Effects of various substrate materials on microstructural and optical properties of amorphous silicon oxynitride thin films deposited by plasma-enhanced chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2020.138186 ◽

2020 ◽

Vol 709 ◽

pp. 138186

Author(s):

Liangyi Hang ◽

Weiguo Liu ◽

Junqi Xu ◽

Chen Yang ◽

Shun Zhou

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Oxynitride

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Nanostructure and optical properties of CeO2 thin films obtained by plasma-enhanced chemical vapor deposition

Materials Science and Engineering C ◽

10.1016/j.msec.2003.09.103 ◽

2003 ◽

Vol 23 (6-8) ◽

pp. 1013-1016 ◽

Cited By ~ 47

Author(s):

D. Barreca ◽

G. Bruno ◽

A. Gasparotto ◽

M. Losurdo ◽

E. Tondello

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor

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Structural and optical properties of Zn1−xMgxO thin films synthesized with metal organic chemical vapor deposition

Journal of Electronic Materials ◽

10.1007/s11664-006-0217-7 ◽

2006 ◽

Vol 35 (8) ◽

pp. 1680-1684 ◽

Cited By ~ 14

Author(s):

S. -H. Park ◽

K. -B. Kim ◽

S. -Y. Seo ◽

S. -H. Kim ◽

S. -W. Han

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Structural And Optical Properties ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Structural and optical properties of a-plane ZnO thin films synthesized on γ-LiAlO2 (302) substrates by low pressure metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2007.10.128 ◽

2008 ◽

Vol 516 (18) ◽

pp. 6079-6082 ◽

Cited By ~ 17

Author(s):

Hui Lin ◽

Shengming Zhou ◽

Jianhua Zhou ◽

Xuedong Liu ◽

Shulin Gu ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Structural And Optical Properties ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

Applied Physics Letters ◽

10.1063/1.1424072 ◽

2001 ◽

Vol 79 (23) ◽

pp. 3782-3784 ◽

Cited By ~ 32

Author(s):

Z. Xu ◽

A. Daga ◽

Haydn Chen

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Scandium Oxide ◽

Oxide Thin Films ◽

Metalorganic Chemical

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