scholarly journals Characterization of a bimorph deformable mirror using stroboscopic phase-shifting interferometry

2007 ◽  
Vol 134 (1) ◽  
pp. 221-230 ◽  
Author(s):  
David A. Horsley ◽  
Hyunkyu Park ◽  
Sophie P. Laut ◽  
John S. Werner
Keyword(s):  
Phase Shifting ◽  
Deformable Mirror ◽  
Phase Shifting Interferometry

Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

2020 ◽  
Author(s):  
Jan Kredba ◽  
Marek Stašík ◽  
Marek Mach ◽  
Ondřej Matoušek ◽  
Vasyl Karabyn
Keyword(s):  
Phase Shifting ◽  
Surface Form ◽  
Plane Parallel ◽  
Phase Shifting Interferometry

Characterization of nanodefects in silicon wafers by white light phase shifting interferometry

2003 ◽  
Author(s):  
Ganesha Udupa ◽  
Bryan K. A. Ngoi ◽  
H. C. F. Goh ◽  
M. N. Yusoff ◽  
A. V. Patil
Keyword(s):  
White Light ◽  
Silicon Wafers ◽  
Phase Shifting ◽  
Light Phase ◽  
Phase Shifting Interferometry

Electrical Dimension Characterization of Binary and Alternating Aperture Phase-Shifting Masks

2002 ◽  
Author(s):  
Martin McCallum ◽  
Stewart Smith ◽  
Alan Lissimore ◽  
Anthony J. Walton ◽  
J. Tom M. Stevenson
Keyword(s):  
Phase Shifting

Phase-shifting interferometry with uncalibrated phase shifts

2000 ◽  
Vol 39 (4) ◽  
pp. 585 ◽  
Author(s):  
Xin Chen ◽  
Maureen Gramaglia ◽  
John A. Yeazell
Keyword(s):  
Phase Shifts ◽  
Phase Shifting ◽  
Phase Shifting Interferometry
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