Characterization of nanodefects in silicon wafers by white light phase shifting interferometry

Mapping Intimacies ◽

10.1117/12.526906 ◽

2003 ◽

Author(s):

Ganesha Udupa ◽

Bryan K. A. Ngoi ◽

H. C. F. Goh ◽

M. N. Yusoff ◽

A. V. Patil

Keyword(s):

White Light ◽

Silicon Wafers ◽

Phase Shifting ◽

Light Phase ◽

Phase Shifting Interferometry

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Fringe-Order Determination Method in White-Light Phase-Shifting Interferometry for the Compensation of the Phase Delay and the Suppression of Excessive Phase Unwrapping

Journal of the Optical Society of Korea ◽

10.3807/josk.2013.17.5.415 ◽

2013 ◽

Vol 17 (5) ◽

pp. 415-422 ◽

Cited By ~ 5

Author(s):

SeongRyong Kim ◽

JungHwan Kim ◽

HeuiJae Pahk

Keyword(s):

White Light ◽

Phase Unwrapping ◽

Phase Delay ◽

Phase Shifting ◽

Determination Method ◽

Fringe Order ◽

Light Phase ◽

Phase Shifting Interferometry ◽

Order Determination

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Correction of PZT scanner errors using phase compensation method in White Light Phase Shifting Interferometry

Applied Optics ◽

10.1364/ao.437533 ◽

2021 ◽

Author(s):

Soonyang Kwon ◽

Namyoon Kim

Keyword(s):

White Light ◽

Compensation Method ◽

Phase Shifting ◽

Light Phase ◽

Phase Compensation ◽

Phase Shifting Interferometry

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White light phase shifting interferometry and color fringe analysis for the detection of contaminants in water

10.1117/12.2212405 ◽

2016 ◽

Cited By ~ 3

Author(s):

Vishesh Dubey ◽

Veena Singh ◽

Azeem Ahmad ◽

Gyanendra Singh ◽

Dalip Singh Mehta

Keyword(s):

White Light ◽

Phase Shifting ◽

Fringe Analysis ◽

Light Phase ◽

Phase Shifting Interferometry ◽

Color Fringe

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An algorithm for profilometry by white light phase shifting interferometry

Journal of Modern Optics ◽

10.1080/095003496154987 ◽

1996 ◽

Vol 43 (8) ◽

pp. 1545-1554 ◽

Cited By ~ 2

Author(s):

PATRICK SANDOZ

Keyword(s):

White Light ◽

Phase Shifting ◽

Light Phase ◽

Phase Shifting Interferometry

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High-Stability Algorithm in White-Light Phase-Shifting Interferometry for Disturbance Suppression

IEEE Photonics Journal ◽

10.1109/jphot.2018.2867001 ◽

2018 ◽

Vol 10 (5) ◽

pp. 1-18

Author(s):

Chunxi Zhang ◽

Haowei Li ◽

Ningfang Song ◽

Huipeng Li

Keyword(s):

White Light ◽

High Stability ◽

Phase Shifting ◽

Light Phase ◽

Phase Shifting Interferometry ◽

Disturbance Suppression

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New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2007.08.008 ◽

2008 ◽

Vol 46 (2) ◽

pp. 140-148 ◽

Cited By ~ 7

Author(s):

Jung-Hwan Kim ◽

Sung-Won Yoon ◽

Jeong-Ho Lee ◽

Woo-Jung Ahn ◽

Heui-Jae Pahk

Keyword(s):

Error Correction ◽

White Light ◽

Phase Error ◽

Phase Shifting ◽

Light Phase ◽

Main Processor ◽

Phase Shifting Interferometry

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Challenges in white-light phase-shifting interferometry

10.1117/12.472211 ◽

2002 ◽

Cited By ~ 5

Author(s):

Joanna Schmit ◽

Artur G. Olszak

Keyword(s):

White Light ◽

Phase Shifting ◽

Light Phase ◽

Phase Shifting Interferometry

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An algorithm for profilometry by white-light phase-shifting interferometry

Journal of Modern Optics ◽

10.1080/09500349608232826 ◽

1996 ◽

Vol 43 (8) ◽

pp. 1545-1554 ◽

Cited By ~ 4

Author(s):

Patrick Sandoz

Keyword(s):

White Light ◽

Phase Shifting ◽

Light Phase ◽

Phase Shifting Interferometry

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White light phase-shifting interferometry with self-compensation of PZT scanning errors

10.1117/12.347782 ◽

1999 ◽

Cited By ~ 3

Author(s):

Seung-Woo Kim ◽

MinGu Kang ◽

SangYoon Lee

Keyword(s):

White Light ◽

Phase Shifting ◽

Light Phase ◽

Phase Shifting Interferometry

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Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry

Journal of Modern Optics ◽

10.1080/09500349708232918 ◽

1997 ◽

Vol 44 (3) ◽

pp. 519-534 ◽

Cited By ~ 72

Author(s):

Patrick Sandoz ◽

Robert Devillers ◽

Arturo Plata

Keyword(s):

White Light ◽

Phase Shifting ◽

Fringe Order ◽

Light Phase ◽

Phase Shifting Interferometry

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