Electrical Dimension Characterization of Binary and Alternating Aperture Phase-Shifting Masks

2002 ◽  
Author(s):  
Martin McCallum ◽  
Stewart Smith ◽  
Alan Lissimore ◽  
Anthony J. Walton ◽  
J. Tom M. Stevenson
Keyword(s):  
1997 ◽  
Author(s):  
Kenneth A. Goldberg ◽  
Edita Tejnil ◽  
Sang Hun Lee ◽  
Hector Medecki ◽  
David T. Attwood, Jr. ◽  
...  
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2020 ◽  
Author(s):  
Jan Kredba ◽  
Marek Stašík ◽  
Marek Mach ◽  
Ondřej Matoušek ◽  
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2007 ◽  
Vol 134 (1) ◽  
pp. 221-230 ◽  
Author(s):  
David A. Horsley ◽  
Hyunkyu Park ◽  
Sophie P. Laut ◽  
John S. Werner

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