Real-time demodulation scheme based on phase-shifting interferometry with error compensations for miniature Fabry-Perot acoustic sensors

2006 ◽  
Author(s):  
Zhong Chen ◽  
Yuxiang Liu ◽  
He Li ◽  
Miao Yu
Keyword(s):  
Real Time ◽  
Phase Shifting ◽  
Acoustic Sensors ◽  
Phase Shifting Interferometry ◽  
Fabry Perot

scholarly journals High speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity

2009 ◽  
Vol 17 (3) ◽  
pp. 1442 ◽  
Author(s):  
Chu-Shik Kang ◽  
Jong-Ahn Kim ◽  
Tae Bong Eom ◽  
Roma Jang ◽  
Hae Yong Park ◽  
...  
Keyword(s):  
High Speed ◽  
Laser Frequency ◽  
Injection Locking ◽  
Phase Shifting ◽  
Phase Shifting Interferometry ◽  
Resonant Modes ◽  
Fabry Perot

Image Based MEMS Dynamics Characterization System

2004 ◽  
Author(s):  
Jinpeng Bai ◽  
Yongjun Xie ◽  
Tielin Shi ◽  
Sheng Liu
Keyword(s):  
Real Time ◽  
Nonlinear Behavior ◽  
Phase Shifting ◽  
Mems Devices ◽  
Dynamic Behaviors ◽  
Phase Shifting Interferometry ◽  
Time Observation ◽  
Real Time Observation

For MEMS with moveable parts, it is crucial for the designers and fabricators to conduct real time observation of dynamic behaviors of the device and the packaged system, especially when the nonlinear behavior is obvious. This article presents an image based characterization system in which phase shifting interferometry, microvision, and strobe illumination are integrated. Several measurement examples of MEMS devices carried out by this system are presented.

Phase-shifting interferometry with equal phase steps by use of a frequency-tunable diode laser and a Fabry–Perot cavity

2005 ◽  
Vol 44 (26) ◽  
pp. 5403 ◽  
Author(s):  
Youichi Bitou ◽  
Hajime Inaba ◽  
Feng-Lei Hong ◽  
Toshiyuki Takatsuji ◽  
Atsushi Onae
Keyword(s):  
Diode Laser ◽  
Phase Shifting ◽  
Tunable Diode Laser ◽  
Phase Shifting Interferometry ◽  
Fabry Perot ◽  
Frequency Tunable

Automatic real-time generalized phase-shifting interferometry to process interferograms with spatio-temporal visibility

2013 ◽  
Author(s):  
Rigoberto Juarez-Salazar ◽  
Carlos Robledo-Sanchez ◽  
Cruz Meneses-Fabian ◽  
Gustavo Rodriguez-Zurita ◽  
Fermin Guerrero Sanchez ◽  
...  
Keyword(s):  
Real Time ◽  
Phase Shifting ◽  
Phase Shifting Interferometry ◽  
Spatio Temporal
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