Stable preparation process of superconductor–insulator multilayer films for HTS devices by off-axis magnetron sputtering

2006 ◽  
Vol 445-448 ◽  
pp. 895-899 ◽  
Author(s):  
S. Adachi ◽  
H. Wakana ◽  
Ai Kamitani ◽  
K. Tanabe
Keyword(s):  
Magnetron Sputtering ◽  
Multilayer Films ◽  
Preparation Process

Modulation Structure and Superhardness Effect of VC/TiN Nano-Multilayer Films

2012 ◽  
Vol 184-185 ◽  
pp. 1080-1083
Author(s):  
Jian Ling Yue ◽  
Wei Shi ◽  
Ge Yang Li
Keyword(s):  
Elastic Modulus ◽  
Magnetron Sputtering ◽  
Layer Thickness ◽  
Coherent Structure ◽  
Multilayer Films ◽  
Critical Layer ◽  
Maximum Hardness ◽  
Critical Layer Thickness ◽  
The Relationship

A series of VC/TiN nano-multilayer films with various TiN layer thicknesses were synthesized by magnetron sputtering method. The relationship between the modulation structure and superhardness effect of the multilayer films were investigated. The results reveal that TiN below a critical layer thickness grows coherently with VC layers in multilayers. Correspondingly, the hardness and elastic modulus of the multilayers increase significantly. The maximum hardness and modulus achieved in these multilayers is 40.7GPa and 328GPa.With further increase in the TiN layer thickness, coherent structure of multilayers are destroyed, resulting in a remarkable decrease of hardness and modulus. The superhardness effect of multilayers is related to the three directional strains generated from the coherent structure.

Effects of period number and sputtering time on optical properties of Si/Ge multilayer films deposited by magnetron sputtering

2017 ◽  
Vol 29 (2) ◽  
pp. 1672-1679
Author(s):  
Jinsong Liu ◽  
Ziquan Li ◽  
Zhengying Wu ◽  
Kongjun Zhu ◽  
Qingyang Xi ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Multilayer Films

scholarly journals Dielectric Multilayer Films Fabricated by Magnetron Sputtering: How Far Can the Iridescence Be Tuned?

2009 ◽  
Vol 6 (S1) ◽  
pp. S746-S750 ◽  
Author(s):  
Olivier Deparis ◽  
Marie Rassart ◽  
Cédric Vandenbem ◽  
Victoria Welch ◽  
Jean-Pol Vigneron ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Multilayer Films ◽  
Dielectric Multilayer

Ultrasmooth, Conducting Films Composed of Mo/Si Multilayers

1995 ◽  
Vol 403 ◽  
Author(s):  
D. G. Stearns ◽  
S. L. Baker ◽  
M. A. Wall
Keyword(s):  
Electron Transport ◽  
Magnetron Sputtering ◽  
Layer Thickness ◽  
Multilayer Films

AbstractWe investigate the variation of microstructure and electron transport with layer thickness in Mo/Si multilayer films deposited by magnetron sputtering.

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