scholarly journals Effects of a ZnO buffer layer on the resistivity and transmittance of GZO/AZO multilayer films deposited by r. f. magnetron sputtering on polymer substrates

2007 ◽  
Vol 32 (4) ◽  
pp. 911-915
Author(s):  
Chongmu Lee ◽  
Sookjoo Kim ◽  
Minwoo Park ◽  
Su Young Park ◽  
Wan In Lee ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Multilayer Films ◽  
Polymer Substrates ◽  
Zno Buffer Layer

Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering

2013 ◽  
Vol 90 ◽  
pp. 49-52 ◽  
Author(s):  
Xiangqin Meng ◽  
Chengtao Yang ◽  
Qingqing Chen ◽  
Yang Gao ◽  
Jiancang Yang
Keyword(s):  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Si Substrate ◽  
Dc Magnetron Sputtering ◽  
Zno Buffer Layer

Effect of Excimer Laser Annealing on Optical Properties of GaN Films Deposited by R.F. Magnetron Sputtering

2001 ◽  
Vol 693 ◽  
Author(s):  
Man Young Sung ◽  
Woong-Je Sung ◽  
Yong-Il Lee ◽  
Chun-Il Park ◽  
Woo-Boem Choi ◽  
...  
Keyword(s):  
Thin Films ◽  
Energy Density ◽  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Laser Energy ◽  
Laser Energy Density ◽  
Excimer Laser Annealing ◽  
Zno Buffer Layer

Abstract:GaN thin films on sapphire were grown by RF magnetron sputtering with ZnO buffer layer. The tremendous mismatch between the lattices of GaN and sapphire can be partly overcome by the use of thin buffer layer of ZnO. The dependence of GaN film quality on ZnO buffer layer was investigated by X-ray diffraction(XRD). The properties of the sputtered GaN are strongly dependent on ZnO buffer layer thickness. The optimum thickness of ZnO buffer layer is around 30nm. Using XRD analysis, we have found the optimal substrate temperature which can grow high quality GaN thin film. In addition, the effect of excimer laser annealing(ELA) on structural and electrical properties of GaN thin films was investigated. The surface roughness and images according to the laser energy density were investigated by atomic force microscopy(AFM) and it was confirmed that the crystallization was improved by increasing laser energy density.

scholarly journals Property Improvement of Transparent Conducting Al-doped ZnO Film by ZnO Buffer Layer Deposited on Polymer Substrates

2009 ◽  
Vol 52 (3) ◽  
pp. 153-155 ◽  
Author(s):  
Yuki UENO ◽  
Naoya ICHII ◽  
Toshimichi KAMINISHI ◽  
Takanori AOKI ◽  
Akio SUZUKI ◽  
...  
Keyword(s):  
Buffer Layer ◽  
Zno Film ◽  
Polymer Substrates ◽  
Transparent Conducting ◽  
Doped Zno ◽  
Zno Buffer Layer
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