Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry

2006 ◽  
Vol 257 (2) ◽  
pp. 217-224 ◽  
Author(s):  
N.R. Sivakumar ◽  
B. Tan ◽  
K. Venkatakrishnan
Keyword(s):  
Surface Profile ◽  
Phase Shifting ◽  
Instantaneous Phase ◽  
Phase Shifting Interferometry

scholarly journals High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry

2021 ◽  
Vol 2021 ◽  
pp. 1-8
Author(s):  
Donge Zhao ◽  
Chaozheng Jia ◽  
Yayun Ma ◽  
Xuefeng Yang ◽  
Bin Zhang ◽  
...  
Keyword(s):  
Phase Modulation ◽  
Spatial Light Modulator ◽  
Surface Profile ◽  
Phase Shifting ◽  
Profile Measurement ◽  
Vortex Beam ◽  
Light Modulator ◽  
Vortex Phase ◽  
Phase Shifting Interferometry ◽  
Nonlinear Phase

According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the reference light. The influence of the nonlinear phase modulation characteristics of the spatial light modulator on the measurement precision is studied. The results show that nonlinear phase modulation has a great impact on the measurement. Then, the vortex lights with initial phases of 0, π/2, π, and 3π/2 are used to measure the H-type thin film sample based on the Twyman-Green interference system after correcting the nonlinear phase modulation characteristics. The experimental results show that the measurement error of the surface profile to an object with the theoretical value of 20 nm is 1.146 nm, and the feasibility of the optical vortex phase-shifting technique used to measure the surface profile of an object is verified.

scholarly journals Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry

Sensors ◽  
2019 ◽  
Vol 19 (23) ◽  
pp. 5094 ◽  
Author(s):  
Jun Woo Jeon ◽  
Ki-Nam Joo
Keyword(s):  
Smooth Surface ◽  
Surface Profile ◽  
Phase Shifting ◽  
Single Shot ◽  
Spatial Phase ◽  
Phase Shifting Interferometry ◽  
Large Step ◽  
Measurement Results ◽  
Surface Profiles ◽  
Good Agreement

In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry.

Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry

2015 ◽  
Vol 54 (13) ◽  
pp. 4207 ◽  
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Silicon Wafer ◽  
Surface Profile ◽  
Phase Shifting ◽  
Profile Measurement ◽  
Phase Shifting Interferometry ◽  
Surface Profile Measurement

Phase-shifting interferometry with uncalibrated phase shifts

2000 ◽  
Vol 39 (4) ◽  
pp. 585 ◽  
Author(s):  
Xin Chen ◽  
Maureen Gramaglia ◽  
John A. Yeazell
Keyword(s):  
Phase Shifts ◽  
Phase Shifting ◽  
Phase Shifting Interferometry
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