Surface profile measurement of thin film using phase-shifting interferometry

Mapping Intimacies ◽

10.1117/12.212652 ◽

1995 ◽

Cited By ~ 1

Author(s):

Yiping Xu ◽

Yuanjing Li

Keyword(s):

Thin Film ◽

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Phase Shifting Interferometry ◽

Surface Profile Measurement

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Large surface profile measurement with instantaneous phase-shifting interferometry

Optical Engineering ◽

10.1117/1.1532331 ◽

2003 ◽

Vol 42 (2) ◽

pp. 367 ◽

Cited By ~ 22

Author(s):

N. R. Sivakumar

Keyword(s):

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Instantaneous Phase ◽

Phase Shifting Interferometry ◽

Surface Profile Measurement

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Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry

Applied Optics ◽

10.1364/ao.54.004207 ◽

2015 ◽

Vol 54 (13) ◽

pp. 4207 ◽

Cited By ~ 14

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Silicon Wafer ◽

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Phase Shifting Interferometry ◽

Surface Profile Measurement

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Single-shot deflectometry for dynamic 3D surface profile measurement by modified spatial-carrier frequency phase-shifting method

Scientific Reports ◽

10.1038/s41598-019-39514-6 ◽

2019 ◽

Vol 9 (1) ◽

Cited By ~ 6

Author(s):

Manh The Nguyen ◽

Young-Sik Ghim ◽

Hyug-Gyo Rhee

Keyword(s):

Carrier Frequency ◽

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Single Shot ◽

3D Surface ◽

Phase Shifting Method ◽

Surface Profile Measurement ◽

Frequency Phase

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A New Three-Dimensional Profilometer for Surface Profile Measurement Using Digital Fringe Projection and Phase Shifting

Key Engineering Materials - Measurement Technology and Intelligent Instruments VI ◽

10.4028/0-87849-977-6.471 ◽

2005 ◽

pp. 471-476 ◽

Cited By ~ 2

Author(s):

Liang Chia Chen ◽

S.H. Tsai ◽

Kuang Chao Fan

Keyword(s):

Three Dimensional ◽

Surface Profile ◽

Phase Shifting ◽

Fringe Projection ◽

Profile Measurement ◽

Digital Fringe Projection ◽

Surface Profile Measurement

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Surface profile measurement techniques for large aperture optical thin film membrane structures

Optics & Laser Technology ◽

10.1016/j.optlastec.2013.03.018 ◽

2013 ◽

Vol 51 ◽

pp. 47-54

Author(s):

Kevin D. Spradley ◽

Don A. Gregory ◽

G. John Outerbridge

Keyword(s):

Thin Film ◽

Measurement Techniques ◽

Surface Profile ◽

Profile Measurement ◽

Membrane Structures ◽

Optical Thin Film ◽

Large Aperture ◽

Thin Film Membrane ◽

Surface Profile Measurement

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Surface profile measurement of moving objects by using an improved π phase-shifting Fourier transform profilometry

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2008.08.003 ◽

2009 ◽

Vol 47 (1) ◽

pp. 57-61 ◽

Cited By ~ 36

Author(s):

Eryi Hu ◽

Yuming He

Keyword(s):

Fourier Transform ◽

Moving Objects ◽

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Fourier Transform Profilometry ◽

Surface Profile Measurement

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Stabilization improvements of laser-diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement

Applied Optics ◽

10.1364/ao.42.001805 ◽

2003 ◽

Vol 42 (10) ◽

pp. 1805 ◽

Cited By ~ 13

Author(s):

Masayuki Yokota ◽

Atsuyoshi Asaka ◽

Toshihiko Yoshino

Keyword(s):

Laser Diode ◽

Closed Loop ◽

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Surface Profile Measurement

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One-shot surface profile measurement using polarized phase-shifting

10.1117/12.836308 ◽

2009 ◽

Cited By ~ 2

Author(s):

Yuan-Fang Chen ◽

Yi-liang Du

Keyword(s):

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Surface Profile Measurement

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Surface Profile Measurement of Coal Based on Structured Light Multifrequency Phase-Shifting Technique

Laser & Optoelectronics Progress ◽

10.3788/lop56.041102 ◽

2019 ◽

Vol 56 (4) ◽

pp. 041102

Author(s):

吴庆尉 Wu Qingwei ◽

范海东 Fan Haidong ◽

关键 Guan Jian ◽

吴迎春 Wu Yingchun ◽

吴学成 Wu Xuecheng

Keyword(s):

Structured Light ◽

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Phase Shifting Technique ◽

Surface Profile Measurement

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Phase-shifting digital projection system for surface profile measurement

10.1117/12.189113 ◽

1994 ◽

Cited By ~ 3

Author(s):

Chi-Shing Chan ◽

Anand K. Asundi

Keyword(s):

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Projection System ◽

Digital Projection ◽

Surface Profile Measurement

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