Light-emitting silicon films fabricated by neutral cluster deposition and subsequent high-temperature annealing
2006 ◽
Vol 251
(1)
◽
pp. 109-114
Keyword(s):
2006 ◽
Vol 352
(21-22)
◽
pp. 2109-2113
◽
Keyword(s):
1989 ◽
Vol 114
◽
pp. 178-180
◽
1980 ◽
Vol 33
(10)
◽
pp. 1019-1023
◽
Keyword(s):
2012 ◽
Vol 9
(10-11)
◽
pp. 2194-2197
◽
Keyword(s):
2020 ◽
Vol 217
(7)
◽
pp. 1900796
◽
2005 ◽
Vol 113
(3-4)
◽
pp. 279-284
◽
Defect reduction in oxygen implanted silicon-on-insulator material during high-temperature annealing
1989 ◽
Vol 47
◽
pp. 604-605