Improving AlN Crystal Quality and Strain Management on Nanopatterned Sapphire Substrates by High‐Temperature Annealing for UVC Light‐Emitting Diodes
2020 ◽
Vol 217
(7)
◽
pp. 1900796
◽
Keyword(s):
Keyword(s):
2015 ◽
Vol 33
(3)
◽
pp. 032402