Electrical characterization of hafnium oxide and hafnium-rich silicate films grown by atomic layer deposition

2005 ◽  
Vol 45 (5-6) ◽  
pp. 949-952 ◽  
Author(s):  
S. Dueñas ◽  
H. Castán ◽  
H. García ◽  
J. Barbolla ◽  
K. Kukli ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition

Optical and electrical characterization of hafnium oxide deposited by liquid injection atomic layer deposition

2007 ◽  
Vol 47 (4-5) ◽  
pp. 825-829 ◽  
Author(s):  
P. Taechakumput ◽  
S. Taylor ◽  
O. Buiu ◽  
R.J. Potter ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Liquid Injection

Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition

2019 ◽  
Vol 19 (2) ◽  
pp. 72-81 ◽  
Author(s):  
Xing Li ◽  
Hong-Liang Lu ◽  
Hong-Ping Ma ◽  
Jian-Guo Yang ◽  
Jin-Xin Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition

Physical and electrical characterization of yttrium-stabilized zirconia (YSZ) thin films deposited by sputtering and atomic-layer deposition

2018 ◽  
Vol 29 (18) ◽  
pp. 15349-15357 ◽  
Author(s):  
Joel Molina-Reyes ◽  
Hugo Tiznado ◽  
Gerardo Soto ◽  
Monica Vargas-Bautista ◽  
David Dominguez ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Stabilized Zirconia ◽  
Layer Deposition

Infrared characterization of hafnium oxide grown by atomic layer deposition using ozone as the oxygen precursor

2007 ◽  
Vol 90 (2) ◽  
pp. 022906 ◽  
Author(s):  
Y. Wang ◽  
M. Dai ◽  
M.-T. Ho ◽  
L. S. Wielunski ◽  
Y. J. Chabal
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Layer Deposition
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